| 11041253 |
Silicon wafers by epitaxial deposition |
Visweswaren Sivaramakrishnan, Tirunelveli S. Ravi, Quoc Truong, Jean R. Vatus |
2021-06-22 |
| 9982363 |
Silicon wafers by epitaxial deposition |
Visweswaren Sivaramakrishnan, Tirunelveli S. Ravi, Quoc Truong, Jean R. Vatus |
2018-05-29 |
| 9920451 |
High throughput multi-wafer epitaxial reactor |
Visweswaren Sivaramakrishnan, Kedarnath Sangam, Tirunelveli S. Ravi, Quoc Truong |
2018-03-20 |
| 9556522 |
High throughput multi-wafer epitaxial reactor |
Visweswaren Sivaramakrishnan, Kedarnath Sangam, Tirunelveli S. Ravi, Quoc Truong |
2017-01-31 |
| 9255346 |
Silicon wafers by epitaxial deposition |
Visweswaren Sivaramakrishnan, Tirunelveli S. Ravi, Quoc Truong, Jean R. Vatus |
2016-02-09 |
| 8673081 |
High throughput multi-wafer epitaxial reactor |
Visweswaren Sivaramakrishnan, Kedarnath Sangam, Tirunelveli S. Ravi, Quoc Truong |
2014-03-18 |
| 8663753 |
High throughput multi-wafer epitaxial reactor |
Visweswaren Sivaramakrishnan, Kedarnath Sangam, Tirunelveli S. Ravi, Quoc Vinh |
2014-03-04 |
| 8338809 |
Ultraviolet reflector with coolant gas holes and method |
Yao-Hung YANG, Tuan Nguyen, Sanjeev Baluja, Juan Carlos Rocha, Thomas Nowak +1 more |
2012-12-25 |
| 8298629 |
High throughput multi-wafer epitaxial reactor |
Visweswaren Sivaramakrishnan, Kedarnath Sangam, Tirunelveli S. Ravi, Quoc Truong |
2012-10-30 |
| 7964858 |
Ultraviolet reflector with coolant gas holes and method |
Yao-Hung YANG, Tuan Nguyen, Sanjeev Baluja, Juan Carlos Rocha, Thomas Nowak +1 more |
2011-06-21 |
| 7663121 |
High efficiency UV curing system |
Thomas Nowak, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson, Dustin W. Ho, Sanjeev Baluja +3 more |
2010-02-16 |
| 7628863 |
Heated gas box for PECVD applications |
Soovo Sen, Inna Shmurun, Thomas Nowak, Nancy Fung, Brian Hopper +1 more |
2009-12-08 |
| 7582167 |
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support |
Sophia M. Velastegui, Visweswaren Sivaramakrishnan, Pyongwon Yim, Mario David Silvetti, Tom K. Cho +2 more |
2009-09-01 |
| 7554103 |
Increased tool utilization/reduction in MWBC for UV curing chamber |
Juan Carlos Rocha-Alvarez, Thomas Nowak, Sanjeev Baluja, Ndanka O. Mukuti |
2009-06-30 |
| 7279049 |
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support |
Sophia M. Velastegui, Visweswaren Sivaramakrishnan, Pyongwon Yim, Mario David Silvetti, Tom K. Cho +2 more |
2007-10-09 |
