Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8444926 | Processing chamber with heated chamber liner | Mark Fodor, Bok Hoen Kim, Dale R. DuBois | 2013-05-21 |
| 7582167 | Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support | Andrzej Kaszuba, Visweswaren Sivaramakrishnan, Pyongwon Yim, Mario David Silvetti, Tom K. Cho +2 more | 2009-09-01 |
| 7279049 | Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support | Andrzej Kaszuba, Visweswaren Sivaramakrishnan, Pyongwon Yim, Mario David Silvetti, Tom K. Cho +2 more | 2007-10-09 |
| 7024105 | Substrate heater assembly | Mark Fodor, Soovo Sen, Visweswaren Sivaramakrishnan, Peter Wai-Man Lee, Mario David Silvetti | 2006-04-04 |