Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971389 | Multi-zone pedestal for plasma processing | Xing Lin, Bozhi Yang, Jianhua Zhou, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2021-04-06 |
| 10711347 | Micro-volume deposition chamber | Karthik Janakiraman, Kien N. Chuc | 2020-07-14 |
| 10236197 | Processing system containing an isolation region separating a deposition chamber from a treatment chamber | Karthik Janakiraman, Abhijit Basu Mallick, Hari Ponnekanti, Mandyam Sriram, Alexandros T. Demos +2 more | 2019-03-19 |
| 10113231 | Process kit including flow isolator ring | Kalyanjit Ghosh, Kien N. Chuc, Mayur Govind Kulkarni, Sanjeev Baluja, Yanjie Wang +1 more | 2018-10-30 |
| 10090187 | Multi-zone pedestal for plasma processing | Xing Lin, Bozhi Yang, Jianhua Zhou, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2018-10-02 |
| 9725806 | Multi-zone pedestal for plasma processing | Xing Lin, Bozhi Yang, Jianhua Zhou, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2017-08-08 |
| 8444926 | Processing chamber with heated chamber liner | Mark Fodor, Sophia M. Velastegui, Bok Hoen Kim | 2013-05-21 |
| 8197636 | Systems for plasma enhanced chemical vapor deposition and bevel edge etching | Ashish Shah, Ganesh Balasubramanian, Mark Fodor, Eui Kyoon Kim, Chiu Chan +7 more | 2012-06-12 |
| 7777197 | Vacuum reaction chamber with x-lamp heater | Amir Al-Bayati, Lester D'Cruz, Alexandros T. Demos, Khaled A. Elsheref, Naoyuki Iwasaki +4 more | 2010-08-17 |
| 7699935 | Method and system for supplying a cleaning gas into a process chamber | Ramprakash Sankarakrishnan, Ganesh Balasubramanian, Karthik Janakiraman, Juan Carlos Rocha-Alvarez, Thomas Nowak +2 more | 2010-04-20 |
| 6699530 | Method for constructing a film on a semiconductor wafer | Michal Danek, Marvin Liao, Eric A. Englhardt, Mei Chang, Yeh-Jen Kao +1 more | 2004-03-02 |
| 6494959 | Process and apparatus for cleaning a silicon surface | Arkadii V. Samoilov, Bradley M. Curelop, David Carlson, Paul B. Comita | 2002-12-17 |
| 6455814 | Backside heating chamber for emissivity independent thermal processes | Arkadii V. Samoilov, Lance A. Scudder, Paul B. Comita, Lori D. Washington, David K. Carlson +1 more | 2002-09-24 |
| 6368567 | Point-of-use exhaust by-product reactor | Paul B. Comita, Rekha Ranganathan, David K. Carlson, Hali Forstner | 2002-04-09 |
| 6155198 | Apparatus for constructing an oxidized film on a semiconductor wafer | Michael Danek, Marvin Liao, Eric A. Englhardt, Mei Chang, Yeh-Jen Kao +1 more | 2000-12-05 |
| 5888304 | Heater with shadow ring and purge above wafer surface | Salvador P. Umotoy, Alan F. Morrison, Karl A. Littau, Richard A. Marsh, Lawrence Chung-Lai Lei | 1999-03-30 |
| 5855687 | Substrate support shield in wafer processing reactors | Alan F. Morrison, Richard A. Marsh, Mei Chang | 1999-01-05 |
| 5688331 | Resistance heated stem mounted aluminum susceptor assembly | Michio Aruga, Atsunobu Ohkura, Akihiko Saito, Kenji Suzuki, Kenichi Taguchi +1 more | 1997-11-18 |
| 5522937 | Welded susceptor assembly | Sandy M. Chew, Ronald L. Rose, Manus Wong | 1996-06-04 |
| 5332443 | Lift fingers for substrate processing apparatus | Sandy M. Chew, Shane D. Clark, Ron Rose, Cissy Leung, Alan F. Morrison +1 more | 1994-07-26 |
| 4694778 | Chemical vapor deposition wafer boat | Arthur J. Learn | 1987-09-22 |
| 4641604 | Chemical vapor deposition wafer boat | Arthur J. Learn | 1987-02-10 |
| 4582020 | Chemical vapor deposition wafer boat | Arthur J. Learn | 1986-04-15 |
| 4539933 | Chemical vapor deposition apparatus | Bryant A. Campbell, Ralph F. Manriquez, Nicholas Miller | 1985-09-10 |
| 4524719 | Substrate loading means for a chemical vapor deposition apparatus | Bryant A. Campbell, Ralph F. Manriquez, Nicholas Miller | 1985-06-25 |