Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7642171 | Multi-step anneal of thin films for film densification and improved gap-fill | Nitin K. Ingle, Zheng Yuan, Vikash Banthia, Xinyun Xia, Rong Pan | 2010-01-05 |
| 6916744 | Method and apparatus for planarization of a material by growing a sacrificial film with customized thickness profile | Vedapuram S. Achutharaman, Juan Chacin | 2005-07-12 |
| 6368567 | Point-of-use exhaust by-product reactor | Paul B. Comita, Rekha Ranganathan, David K. Carlson, Dale R. DuBois | 2002-04-09 |
| 6042654 | Method of cleaning CVD cold-wall chamber and exhaust lines | Paul B. Comita, Rekha Ranganathan | 2000-03-28 |