Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368567 | Point-of-use exhaust by-product reactor | Paul B. Comita, David K. Carlson, Dale R. DuBois, Hali Forstner | 2002-04-09 |
| 6254686 | Vented lower liner for heating exhaust gas from a single substrate reactor | Paul B. Comita, David K. Carlson, Norma Riley, Doria W. Fan | 2001-07-03 |
| 6153260 | Method for heating exhaust gas in a substrate reactor | Paul B. Comita, David K. Carlson, Norma Riley, Doria W. Fan | 2000-11-28 |
| 6042654 | Method of cleaning CVD cold-wall chamber and exhaust lines | Paul B. Comita, Hali Forstner | 2000-03-28 |