Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12356848 | Solar antenna array fabrication | Laurence H. Cooke, Robert E. Cousins, Albert K. Henning, Andreas Hegedus, David B. Cooke +3 more | 2025-07-08 |
| 11824264 | Solar antenna array fabrication | Laurence H. Cooke, Darin Scott Olson, Robert E. Cousins, Albert K. Henning, Andreas Hegedus +4 more | 2023-11-21 |
| 10622503 | Solar antenna array fabrication | Jyotsna Iyer, Robert E. Cousins, Laurence H. Cooke | 2020-04-14 |
| 10580920 | Solar antenna array fabrication | Laurence H. Cooke, Andreas Hegedus, Jyotsna Iyer | 2020-03-03 |
| 7812956 | Time dependent fluorescence measurements | Evan F. Cromwell, Johann F. Adam, Andrei Brunfeld, Christopher J. Seipert | 2010-10-12 |
| 7758697 | Silicon-containing layer deposition with silicon compounds | Lance A. Scudder, David K. Carlson | 2010-07-20 |
| 7674588 | Screening using polarization anisotropy in FRET emissions | Steven C. Miller, Christopher Shumate, Evan F. Cromwell | 2010-03-09 |
| 7645339 | Silicon-containing layer deposition with silicon compounds | Kaushal K. Singh, Lance A. Scudder, David K. Carlson | 2010-01-12 |
| 7643146 | Methods and apparatus for reducing noise in scatterometry measurements | Evan F. Cromwell, Steven C. Miller, Robert T. Trujillo | 2010-01-05 |
| 7576862 | Measuring time dependent fluorescence | Evan F. Cromwell, Johann F. Adam, Andrei Brunfeld, Christopher J. Seipert | 2009-08-18 |
| 7540920 | Silicon-containing layer deposition with silicon compounds | Kaushal K. Singh, Lance A. Scudder, David K. Carlson | 2009-06-02 |
| 7141378 | Exploring fluorophore microenvironments | Steven C. Miller, Evan F. Cromwell, Christopher Shumate | 2006-11-28 |
| 6876442 | Method of calibrating and using a semiconductor processing system | Jean R. Vatus, David K. Carlson, Arkadii V. Samoilov, Lance A. Scudder, Annie Karpati | 2005-04-05 |
| 6833322 | Apparatuses and methods for depositing an oxide film | Roger N. Anderson, Ann Waldhauer, Norma Riley | 2004-12-21 |
| 6774040 | Apparatus and method for surface finishing a silicon film | Karin Anna Lena Thilderkvist, Lance A. Scudder | 2004-08-10 |
| 6685779 | Method and a system for sealing an epitaxial silicon layer on a substrate | David K. Carlson, Norma Riley, Dale R. Du Bois | 2004-02-03 |
| 6562720 | Apparatus and method for surface finishing a silicon film | Anna Lena Thilderkvist, Lance A. Scudder, Norma Riley | 2003-05-13 |
| 6494959 | Process and apparatus for cleaning a silicon surface | Arkadii V. Samoilov, Dale R. DuBois, Bradley M. Curelop, David Carlson | 2002-12-17 |
| 6489241 | Apparatus and method for surface finishing a silicon film | Anna Lena Thilderkvist, Lance A. Scudder, Norma Riley | 2002-12-03 |
| 6476362 | Lamp array for thermal processing chamber | Thomas E. Deacon, Roger N. Anderson, David K. Carlson | 2002-11-05 |
| 6455814 | Backside heating chamber for emissivity independent thermal processes | Arkadii V. Samoilov, Dale R. DuBois, Lance A. Scudder, Lori D. Washington, David K. Carlson +1 more | 2002-09-24 |
| 6399510 | Bi-directional processing chamber and method for bi-directional processing of semiconductor substrates | Norma Riley, Roger N. Anderson, Grant D. Imper | 2002-06-04 |
| 6376387 | Method of sealing an epitaxial silicon layer on a substrate | David K. Carlson, Norma Riley, Dale R. Du Bois | 2002-04-23 |
| 6368567 | Point-of-use exhaust by-product reactor | Rekha Ranganathan, David K. Carlson, Dale R. DuBois, Hali Forstner | 2002-04-09 |
| 6366861 | Method of determining a wafer characteristic using a film thickness monitor | Ann Waldhauer, Norma Riley | 2002-04-02 |