Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6523494 | Apparatus for depositing low dielectric constant oxide film | Dung-Ching Perng, Peter Wai-Man Lee | 2003-02-25 |
| 6476362 | Lamp array for thermal processing chamber | Roger N. Anderson, David K. Carlson, Paul B. Comita | 2002-11-05 |
| 6171966 | Delineation pattern for epitaxial depositions | Norma Riley | 2001-01-09 |
| 6149987 | Method for depositing low dielectric constant oxide films | Dung-Ching Perng, Peter Wai-Man Lee | 2000-11-21 |
| 5792269 | Gas distribution for CVD systems | David Cheung, Peter Wai-Man Lee, Judy H. Huang | 1998-08-11 |
| 5194401 | Thermally processing semiconductor wafers at non-ambient pressures | David V. Adams, Roger N. Anderson | 1993-03-16 |
| 5179677 | Apparatus and method for substrate heating utilizing various infrared means to achieve uniform intensity | Roger N. Anderson, David K. Carlson | 1993-01-12 |
| 4920918 | Pressure-resistant thermal reactor system for semiconductor processing | David V. Adams, Roger N. Anderson | 1990-05-01 |