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Linear wafer drive for handling wafers during semiconductor fabrication |
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2018-12-25 |
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Integrated intra-bay transfer, storage, and delivery system |
Anthony C. Bonora, Richard H. Gould, Michael D. Brain |
2002-10-22 |
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Bi-directional hall-effect control device |
Thomas G. Cooper, Alan W. Petersen, Karl Konecny |
2000-02-29 |
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System and method for the verification of a digital control system |
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Optical encoder comprising a plurality of encoder wheels |
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Thermally processing semiconductor wafers at non-ambient pressures |
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1993-03-16 |
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Double-dome reactor for semiconductor processing |
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Wafer reactor vessel window with pressure-thermal compensation |
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Pressure-resistant thermal reactor system for semiconductor processing |
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