Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas distribution for CVD systems

Gas distribution for CVD systems

US Patent 5792269 · Granted Aug 11, 1998

Estimated economic value: $49,410,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Augmented reality based surgical navigation system2025
Systems and methods for metastable activated radical selective strip and etch us2025
Systems and methods for metastable activated radical selective strip and etch us2025
Systems and methods for metastable activated radical selective strip and etch us2025
Systems and methods for metastable activated radical selective strip and etch us2023
Metal doped carbon based hard mask removal in semiconductor fabrication2021
Systems and methods for detecting oxygen in-situ in a substrate area of a substr2019
Substrate processing method for depositing a barrier layer to prevent photoresis2018
High dose implantation strip (HDIS) in H2 base chemistry2018
Dynamic access policies2017
Photoresist strip processes for improved device integrity2017
Plasma generator systems and methods of forming plasma2017