Issued Patents All Time
Showing 1–25 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12295662 | Augmented reality based surgical navigation system | Ehsan Azimi, Peter Kazanzides, Camilo Molina | 2025-05-13 |
| 9034143 | Inductive/capacitive hybrid plasma source and system with such chamber | Young-Kyu Cho, Kenneth Tan, Karthik Janakiraman | 2015-05-19 |
| 8809161 | Flowable film dielectric gap fill process | Vishal Gauri, Raashina Humayun, Chi-I Lang, Michael Barnes, Sunil Shanker | 2014-08-19 |
| 8677929 | Method and apparatus for masking solar cell substrates for deposition | Alexander Berger, Terry Bluck, Vinay Shah, Karthik Janakiraman, Chau Nguyen +1 more | 2014-03-25 |
| 8580697 | CVD flowable gap fill | Chi-I Lang, Michael Barnes, Sunil Shanker | 2013-11-12 |
| 8481403 | Flowable film dielectric gap fill process | Vishal Gauri, Raashina Humayun, Chi-I Lang, Michael Barnes, Sunil Shanker | 2013-07-09 |
| 8183150 | Semiconductor device having silicon carbide and conductive pathway interface | Christopher Dennis Bencher, Sudha Rathi, Christopher S. Ngai, Bok Hoen Kim | 2012-05-22 |
| 7915139 | CVD flowable gap fill | Chi-I Lang, Michael Barnes, Sunil Shanker | 2011-03-29 |
| 7888233 | Flowable film dielectric gap fill process | Vishal Gauri, Raashina Humayun, Chi-I Lang, Michael Barnes, Sunil Shanker | 2011-02-15 |
| 7727906 | H2-based plasma treatment to eliminate within-batch and batch-to-batch etch drift | Sunil Shanker, Chi-I Lang, Minh Anh Nguyen | 2010-06-01 |
| 7670945 | In situ deposition of a low κ dielectric layer, barrier layer, etch stop, and anti-reflective coating for damascene application | — | 2010-03-02 |
| 7582555 | CVD flowable gap fill | Chi-I Lang, Michael Barnes, Sunil Shanker | 2009-09-01 |
| 7524735 | Flowable film dielectric gap fill process | Vishal Gauri, Raashina Humayun, Chi-I Lang, Michael Barnes, Sunil Shanker | 2009-04-28 |
| 7482245 | Stress profile modulation in STI gap fill | Jengyi Yu, Chi-I Lang | 2009-01-27 |
| 7476621 | Halogen-free noble gas assisted H2 plasma etch process in deposition-etch-deposition gap fill | Minh Anh Nguyen, Chi-I Lang, Wenxian Zhu | 2009-01-13 |
| 7470611 | In situ deposition of a low K dielectric layer, barrier layer, etch stop, and anti-reflective coating for damascene application | — | 2008-12-30 |
| 7344996 | Helium-based etch process in deposition-etch-deposition gap fill | Chi-I Lang, Wenxian Zhu, Ratsamee Limdulpaiboon | 2008-03-18 |
| 7227244 | Integrated low k dielectrics and etch stops | Claes Bjorkman, Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more | 2007-06-05 |
| 7211525 | Hydrogen treatment enhanced gap fill | Sunil Shanker, Sean Cox, Chi-I Lang, Minh Anh Nguyen, Ken Vo +1 more | 2007-05-01 |
| 7144606 | Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers | — | 2006-12-05 |
| 7070657 | Method and apparatus for depositing antireflective coating | David Cheung, Joe Feng, Wai-Fan Yau | 2006-07-04 |
| 6974766 | In situ deposition of a low κ dielectric layer, barrier layer, etch stop, and anti-reflective coating for damascene application | — | 2005-12-13 |
| 6951826 | Silicon carbide deposition for use as a low dielectric constant anti-reflective coating | Christopher Dennis Bencher, Joe Feng, Mei-Yee Shek, Chris Ngai | 2005-10-04 |
| 6946401 | Plasma treatment for copper oxide reduction | Christopher Dennis Bencher, Sudha Rathi, Christopher S. Ngai, Bok Hoen Kim | 2005-09-20 |
| 6858153 | Integrated low K dielectrics and etch stops | Claes Bjorkman, Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more | 2005-02-22 |