Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6858153 | Integrated low K dielectrics and etch stops | Claes Bjorkman, Hongquing Shan, David Cheung, Wai-Fan Yau, Kuowei Liu +7 more | 2005-02-22 |
| 6669858 | Integrated low k dielectrics and etch stops | Claes Bjorkman, Hongquing Shan, David Cheung, Wai-Fan Yau, Kuowei Liu +7 more | 2003-12-30 |
| 6387819 | Method for etching low K dielectric layers | — | 2002-05-14 |
| 6340435 | Integrated low K dielectrics and etch stops | Claes Bjorkman, Hongquing Shan, David Cheung, Wai-Fan Yau, Kuowei Liu +7 more | 2002-01-22 |