| 7651725 |
Low dielectric constant film produced from silicon compounds comprising silicon-carbon bond |
Wai-Fan Yau, David Cheung, Shin-Puu Jeng, Yung-Cheng Yu |
2010-01-26 |
| 7227244 |
Integrated low k dielectrics and etch stops |
Claes Bjorkman, Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more |
2007-06-05 |
| 7160821 |
Method of depositing low k films |
Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more |
2007-01-09 |
| 7074708 |
Method of decreasing the k value in sioc layer deposited by chemical vapor deposition |
Frederic Gaillard, Li-Qun Xia, Tian-Hoe Lim, Ellie Yieh, Wai-Fan Yau +2 more |
2006-07-11 |
| 7023092 |
Low dielectric constant film produced from silicon compounds comprising silicon-carbon bonds |
Wai-Fan Yau, David Cheung, Shin-Puu Jeng, Yung-Cheng Yu |
2006-04-04 |
| 6858153 |
Integrated low K dielectrics and etch stops |
Claes Bjorkman, Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more |
2005-02-22 |
| 6806207 |
Method of depositing low K films |
Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more |
2004-10-19 |
| 6784119 |
Method of decreasing the K value in SIOC layer deposited by chemical vapor deposition |
Frederic Gaillard, Li-Qun Xia, Tian-Hoe Lim, Ellie Yieh, Wai-Fan Yau +2 more |
2004-08-31 |
| 6770556 |
Method of depositing a low dielectric with organo silane |
Wai-Fan Yau, David Cheung, Shin-Puu Jeng, Yung-Cheng Yu |
2004-08-03 |
| 6730593 |
Method of depositing a low K dielectric with organo silane |
Wai-Fan Yau, David Cheung, Shin-Puu Jeng, Yung-Cheng Yu |
2004-05-04 |
| 6669858 |
Integrated low k dielectrics and etch stops |
Claes Bjorkman, Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more |
2003-12-30 |
| 6627532 |
Method of decreasing the K value in SiOC layer deposited by chemical vapor deposition |
Frederic Gaillard, Li-Qun Xia, Tian-Hoe Lim, Ellie Yieh, Wai-Fan Yau +2 more |
2003-09-30 |
| 6593247 |
Method of depositing low k films using an oxidizing plasma |
Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more |
2003-07-15 |
| 6511909 |
Method of depositing a low K dielectric with organo silane |
Wai-Fan Yau, David Cheung, Shin-Puu Jeng, Yung-Cheng Yu |
2003-01-28 |
| 6511903 |
Method of depositing a low k dielectric with organo silane |
Wai-Fan Yau, David Cheung, Shin-Puu Jeng, Yung-Cheng Yu |
2003-01-28 |
| 6340435 |
Integrated low K dielectrics and etch stops |
Claes Bjorkman, Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more |
2002-01-22 |
| 6072227 |
Low power method of depositing a low k dielectric with organo silane |
Wai-Fan Yau, David Cheung, Shin-Puu Jeng, Yung-Cheng Yu |
2000-06-06 |
| 6054379 |
Method of depositing a low k dielectric with organo silane |
Wai-Fan Yau, David Cheung, Shin-Puu Jeng, Yung-Cheng Yu |
2000-04-25 |
