Issued Patents All Time
Showing 25 most recent of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077851 | Creation of distributed voids in thin films | Samuel D. Harkness, IV | 2024-09-03 |
| 11897811 | System for forming nano-laminate optical coating | Wendell T. Blonigan | 2024-02-13 |
| 11694913 | Hybrid system architecture for thin film deposition | — | 2023-07-04 |
| 11414748 | System with dual-motion substrate carriers | — | 2022-08-16 |
| 11255013 | Ion implantation for modification of thin film coatings on glass | Babak Adibi | 2022-02-22 |
| 11236013 | System for forming nano-laminate optical coating | Wendell T. Blonigan | 2022-02-01 |
| 11187834 | Multi-colored dielectric coating | Paul R. Markoff Johnson, Alexander Vassilievich Demchuk | 2021-11-30 |
| 10955589 | Optical coating having nano-laminate for improved durability | Gaurav Saraf, James Craig Hunter, Changwan Hwang, Paul Johnson, Jae Ha Choi | 2021-03-23 |
| 10854772 | Multi-piece substrate holder and alignment mechanism | Hoang Huy Vu, Babak Adibi | 2020-12-01 |
| 10752987 | System architecture for combined static and pass-by processing | Patrick Leahey, Eric C. Lawson, Charles Liu, Kevin Fairbairn, Robert Ruck +1 more | 2020-08-25 |
| 10679883 | Wafer plate and mask arrangement for substrate fabrication | Aaron Zanetto, William Eugene Runstadler, Jr., Terry Pederson | 2020-06-09 |
| 10559710 | System of height and alignment rollers for precise alignment of wafers for ion implantation | William Eugene Runstadler, Jr., Babak Adibi | 2020-02-11 |
| 10446430 | Patterned chuck for substrate processing | Babak Adibi, Vinay Prabhakar, William Eugene Runstadler, Jr. | 2019-10-15 |
| 10418260 | In line fan out system | Terry Pederson, William Eugene Runstadler, Jr. | 2019-09-17 |
| 10204810 | Linear vacuum robot with Z motion and articulated arm | Gee Sun Hoey, Hoang Huy Vu, Jimin Ryu | 2019-02-12 |
| 10115617 | System architecture for vacuum processing | Vinay Shah, Alexandru Riposan | 2018-10-30 |
| 10106883 | Sputtering system and method using direction-dependent scan speed or power | Vinay Shah, Alexandru Riposan, Vladimir Kudriavtsev | 2018-10-23 |
| 10062600 | System and method for bi-facial processing of substrates | Vinay Shah, Ian Latchford, Alexandru Riposan | 2018-08-28 |
| 9914994 | System architecture for combined static and pass-by processing | Patrick Leahey, Eric C. Lawson, Charles Liu, Kevin Fairbairn, Robert Ruck +1 more | 2018-03-13 |
| 9892890 | Narrow source for physical vapor deposition processing | Alex Riposan | 2018-02-13 |
| 9875922 | Substrate processing system and method | Terry Pederson, Henry Hieslmair, Moon Chun, Vinay Prabhakar, Babak Adibi | 2018-01-23 |
| 9850570 | Ion implantation for modification of thin film coatings on glass | Babak Adibi | 2017-12-26 |
| 9691649 | Linear vacuum robot with z motion and articulated arm | Gee Sun Hoey, Hoang Huy Vu, Jimin Ryu | 2017-06-27 |
| 9543114 | Implant masking and alignment system with rollers | Babak Adibi, Vinay Prabhakar | 2017-01-10 |
| 9524896 | Apparatus and methods for transporting and processing substrates | Kevin Fairbairn, Michael Barnes, Christopher T. Lane | 2016-12-20 |