| 12077851 |
Creation of distributed voids in thin films |
Samuel D. Harkness, IV |
2024-09-03 |
$875,000 |
| 11897811 |
System for forming nano-laminate optical coating |
Wendell T. Blonigan |
2024-02-13 |
$1,165,000 |
| 11694913 |
Hybrid system architecture for thin film deposition |
— |
2023-07-04 |
|
| 11414748 |
System with dual-motion substrate carriers |
— |
2022-08-16 |
$1,237,000 |
| 11255013 |
Ion implantation for modification of thin film coatings on glass |
Babak Adibi |
2022-02-22 |
$1,835,000 |
| 11236013 |
System for forming nano-laminate optical coating |
Wendell T. Blonigan |
2022-02-01 |
$2,044,000 |
| 11187834 |
Multi-colored dielectric coating |
Paul R. Markoff Johnson, Alexander Vassilievich Demchuk |
2021-11-30 |
$1,692,000 |
| 10955589 |
Optical coating having nano-laminate for improved durability |
Gaurav Saraf, James Craig Hunter, Changwan Hwang, Paul Johnson, Jae Ha Choi |
2021-03-23 |
$1,644,000 |
| 10854772 |
Multi-piece substrate holder and alignment mechanism |
Hoang Huy Vu, Babak Adibi |
2020-12-01 |
$1,749,000 |
| 10752987 |
System architecture for combined static and pass-by processing |
Patrick Leahey, Eric C. Lawson, Charles Liu, Kevin Fairbairn, Robert Ruck +1 more |
2020-08-25 |
$1,537,000 |
| 10679883 |
Wafer plate and mask arrangement for substrate fabrication |
Aaron Zanetto, William Eugene Runstadler, Jr., Terry Pederson |
2020-06-09 |
$1,547,000 |
| 10559710 |
System of height and alignment rollers for precise alignment of wafers for ion implantation |
William Eugene Runstadler, Jr., Babak Adibi |
2020-02-11 |
$1,505,000 |
| 10446430 |
Patterned chuck for substrate processing |
Babak Adibi, Vinay Prabhakar, William Eugene Runstadler, Jr. |
2019-10-15 |
|
| 10418260 |
In line fan out system |
Terry Pederson, William Eugene Runstadler, Jr. |
2019-09-17 |
|
| 10204810 |
Linear vacuum robot with Z motion and articulated arm |
Gee Sun Hoey, Hoang Huy Vu, Jimin Ryu |
2019-02-12 |
$8,553,000 |
| 10115617 |
System architecture for vacuum processing |
Vinay Shah, Alexandru Riposan |
2018-10-30 |
$1,257,000 |
| 10106883 |
Sputtering system and method using direction-dependent scan speed or power |
Vinay Shah, Alexandru Riposan, Vladimir Kudriavtsev |
2018-10-23 |
$1,205,000 |
| 10062600 |
System and method for bi-facial processing of substrates |
Vinay Shah, Ian Latchford, Alexandru Riposan |
2018-08-28 |
$1,494,000 |
| 9914994 |
System architecture for combined static and pass-by processing |
Patrick Leahey, Eric C. Lawson, Charles Liu, Kevin Fairbairn, Robert Ruck +1 more |
2018-03-13 |
$1,414,000 |
| 9892890 |
Narrow source for physical vapor deposition processing |
Alex Riposan |
2018-02-13 |
$1,363,000 |
| 9875922 |
Substrate processing system and method |
Terry Pederson, Henry Hieslmair, Moon Chun, Vinay Prabhakar, Babak Adibi |
2018-01-23 |
$1,640,000 |
| 9850570 |
Ion implantation for modification of thin film coatings on glass |
Babak Adibi |
2017-12-26 |
$1,737,000 |
| 9691649 |
Linear vacuum robot with z motion and articulated arm |
Gee Sun Hoey, Hoang Huy Vu, Jimin Ryu |
2017-06-27 |
$3,592,000 |
| 9543114 |
Implant masking and alignment system with rollers |
Babak Adibi, Vinay Prabhakar |
2017-01-10 |
$1,611,000 |
| 9524896 |
Apparatus and methods for transporting and processing substrates |
Kevin Fairbairn, Michael Barnes, Christopher T. Lane |
2016-12-20 |
$3,854,000 |