Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705354 | Substrate handling systems | Balasubramaniam Coimbatore Jaganathan, Jagan Rangarajan | 2023-07-18 |
| 10751738 | Spray bar design for uniform liquid flow distribution on a substrate | Jagan Rangarajan, Jaimie E. Stomberg, Ekaterina A. Mikhaylichenko | 2020-08-25 |
| 10204810 | Linear vacuum robot with Z motion and articulated arm | Terry Bluck, Hoang Huy Vu, Jimin Ryu | 2019-02-12 |
| 9691649 | Linear vacuum robot with z motion and articulated arm | Terry Bluck, Hoang Huy Vu, Jimin Ryu | 2017-06-27 |
| 9352471 | Substrate gripper apparatus and methods | Edwin Velazquez, Jim K. Atkinson | 2016-05-31 |
| 8419341 | Linear vacuum robot with Z motion and articulated arm | Terry Bluck, Hoang Huy Vu, Jimin Ryu | 2013-04-16 |
| 6951511 | Platen with peripheral frame for supporting a web of polishing material in a chemical mechanical planarization system | Jayakumar Gurusamy, Lawrence Rosenberg | 2005-10-04 |
| 6612914 | Platen with lateral web tensioner | Jayakumar Gurusamy | 2003-09-02 |
| 6482072 | Method and apparatus for providing and controlling delivery of a web of polishing material | Jayakumar Gurusamy, Lawrence Rosenberg | 2002-11-19 |
| 6419559 | Using a purge gas in a chemical mechanical polishing apparatus with an incrementally advanceable polishing sheet | Jayakumar Gurusamy | 2002-07-16 |
| 6358124 | Pad conditioner cleaning apparatus | Raijiro Koga, Hiromi Tsuruta, Takashi Kumagai, Brian J. Brown, Boris Fishkin +5 more | 2002-03-19 |
| 6224470 | Pad cleaning brush for chemical mechanical polishing apparatus and method of making the same | Manoohcer Birang | 2001-05-01 |
| 6217429 | Polishing pad conditioner | — | 2001-04-17 |
| 6217430 | Pad conditioner cleaning apparatus | Raijiro Koga, Hiromi Tsuruta, Takashi Kumagai, Brian J. Brown, Boris Fishkin +1 more | 2001-04-17 |