Patents per Year
Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12420315 | Gas delivery pallet assembly, cleaning unit and chemical mechanical polishing system having the same | — | 2025-09-23 | |
| 11735438 | Methods and apparatus for Marangoni drying | Jagan Rangarajan | 2023-08-22 | $40,609,000 |
| 11710648 | Drying environments for reducing substrate defects | Jim K. Atkinson | 2023-07-25 | $93,796,000 |
| 11430672 | Drying environments for reducing substrate defects | Jim K. Atkinson | 2022-08-30 | $41,861,000 |
| 9352471 | Substrate gripper apparatus and methods | Gee Sun Hoey, Jim K. Atkinson | 2016-05-31 | $8,928,000 |
| 8869422 | Methods and apparatus for marangoni substrate drying using a vapor knife manifold | Allen L. D'Ambra, Jim K. Atkinson | 2014-10-28 | $11,517,000 |