Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Drying environments for reducing substrate defects

Drying environments for reducing substrate defects

US Patent 11710648 · Granted Jul 25, 2023

Estimated economic value: $93,796,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Gas delivery pallet assembly, cleaning unit and chemical mechanical polishing sy2025
Methods and apparatus for Marangoni drying2023
Drying environments for reducing substrate defects2022
Drying environments for reducing substrate defects2022
Systems, methods and apparatus for post-chemical mechanical planarization substr2019
Double sided buff module for post CMP cleaning2019
Compression molded articles employing circumferential surfaces having friction-e2017
Substrate gripper apparatus and methods2016
Substrate gripper apparatus and methods2016
High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subas2015
Methods and apparatus for sensing a substrate in a load cup2015
Methods and apparatus for pre-chemical mechanical planarization buffing module2015