Issued Patents All Time
Showing 25 most recent of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7980255 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Michael Sugarman, Rashid Mavleiv +4 more | 2011-07-19 |
| 7718011 | Apparatus for cleaning and drying substrates | Michael Sherrard | 2010-05-18 |
| 7513062 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Michael Sugarman, Rashid Mavliev +4 more | 2009-04-07 |
| 7252098 | Apparatus for cleaning and drying substrates | Michael Sherrard | 2007-08-07 |
| 6955516 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Michael Sugarman, Rashid Mavliev +4 more | 2005-10-18 |
| 6746544 | Apparatus for cleaning and drying substrates | Michael Sherrard | 2004-06-08 |
| 6468362 | Method and apparatus for cleaning/drying hydrophobic wafers | Youfel Chen, Brian J. Brown, Fred C. Redeker | 2002-10-22 |
| 6464799 | Method for managing a fluid level associated with a substrate processing tank | Alexander Lerner, Brian J. Brown, Jonathan Frankel | 2002-10-15 |
| 6460551 | Megasonic resonator for disk cleaning and method for use thereof | Alexander Lerner, Jianshe Tang, Brian J. Brown | 2002-10-08 |
| 6412499 | Continuous cleaning megasonic tank with reduced duty cycle transducers | Jianshe Tang, Brian J. Brown | 2002-07-02 |
| 6358124 | Pad conditioner cleaning apparatus | Raijiro Koga, Hiromi Tsuruta, Takashi Kumagai, Gee Sun Hoey, Brian J. Brown +5 more | 2002-03-19 |
| 6352403 | Controlled environment enclosure and mechanical interface | Seiji Sato, Robert B. Lowrance | 2002-03-05 |
| 6345630 | Method and apparatus for cleaning the edge of a thin disc | Jianshe Tang, Brian J. Brown | 2002-02-12 |
| 6332470 | Aerosol substrate cleaner | Kyle Brown | 2001-12-25 |
| 6328814 | Apparatus for cleaning and drying substrates | Michael Sherrard | 2001-12-11 |
| 6311702 | Megasonic cleaner | — | 2001-11-06 |
| 6280299 | Combined slurry dispenser and rinse arm | Daniel F. Kennedy, Boris Fuksshimov, Victor Belitsky, Kyle Brown, Tom Osterheld +2 more | 2001-08-28 |
| 6276371 | Method and apparatus for cleaning the edge of a thin disc | Brian J. Brown, Jianshe Tang | 2001-08-21 |
| 6241588 | Cavitational polishing pad conditioner | Kyle Brown | 2001-06-05 |
| 6220941 | Method of post CMP defect stability improvement | Charles C. Garretson, Peter McKeever, Thomas H. Osterheld, Gopalakrishna B. Prabhu, Doyle E. Bennett +2 more | 2001-04-24 |
| 6220259 | Tank design for sonic wafer cleaning | Brian J. Brown | 2001-04-24 |
| 6218306 | Method of chemical mechanical polishing a metal layer | Kapila Wijekoon, Ronald Lin | 2001-04-17 |
| 6217430 | Pad conditioner cleaning apparatus | Raijiro Koga, Hiromi Tsuruta, Takashi Kumagai, Gee Sun Hoey, Brian J. Brown +1 more | 2001-04-17 |
| 6202658 | Method and apparatus for cleaning the edge of a thin disc | Jianshe Tang, Brian J. Brown | 2001-03-20 |
| 6149505 | Cavitational polishing pad conditioner | Kyle Brown | 2000-11-21 |