Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6148833 | Continuous cleaning megasonic tank with reduced duty cycle transducers | Jianshe Tang, Brian J. Brown | 2000-11-21 |
| 6139406 | Combined slurry dispenser and rinse arm and method of operation | Daniel F. Kennedy, Boris Fuksshimov, Victor Belitsky, Kyle Brown, Tom Osterheld +2 more | 2000-10-31 |
| 6119708 | Method and apparatus for cleaning the edge of a thin disc | Brian J. Brown, Jianshe Tang | 2000-09-19 |
| 6082948 | Controlled environment enclosure and mechanical interface | Seiji Sato, Robert B. Lowrance | 2000-07-04 |
| 6027574 | Method of drying a substrate by lowering a fluid surface level | John Hearne, Robert B. Lowrance | 2000-02-22 |
| 6011622 | Particle monitoring system | Phil Salzman | 2000-01-04 |
| 5957754 | Cavitational polishing pad conditioner | Kyle Brown | 1999-09-28 |
| 5884640 | Method and apparatus for drying substrates | John Hearne, Robert B. Lowrance | 1999-03-23 |
| 5697750 | Controlled environment enclosure and mechanical interface | Seiji Sato, Robert B. Lowrance | 1997-12-16 |
| 5565985 | Particle monitoring sensor | Phil Salzman | 1996-10-15 |
| 5463460 | Particle monitoring sensor | Phil Salzman | 1995-10-31 |
| 5287725 | Surface volatile material detector | Jun Zhao, Laszlo Szalai, Terry Francis | 1994-02-22 |
| 5083865 | Particle monitor system and method | Patrick Kinney, Jun Zhao, Anand Gupta, Robert K. Bendler | 1992-01-28 |
| 5047648 | Method and apparatus for detecting particles in ion implantation machines | Michael I. Current | 1991-09-10 |