Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599076 | Dual cassette load lock | Masato Toshima, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +1 more | 2003-07-29 |
| 6454508 | Dual cassette load lock | Masato Toshima, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +1 more | 2002-09-24 |
| 6454519 | Dual cassette load lock | Masato Toshima, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +2 more | 2002-09-24 |
| 6011622 | Particle monitoring system | Boris Fishkin | 2000-01-04 |
| 5848670 | Lift pin guidance apparatus | — | 1998-12-15 |
| 5769588 | Dual cassette load lock | Masato Toshima, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +2 more | 1998-06-23 |
| 5753044 | RF plasma reactor with hybrid conductor and multi-radius dome ceiling | Hiroji Hanawa, Gerald Yin, Diana Xiabing Ma, Peter Loewenhardt, Allen Zhao | 1998-05-19 |
| 5565985 | Particle monitoring sensor | Boris Fishkin | 1996-10-15 |
| 5525759 | Pin-shaped feedthrough | — | 1996-06-11 |
| 5463460 | Particle monitoring sensor | Boris Fishkin | 1995-10-31 |
| 5186594 | Dual cassette load lock | Masato Toshima, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +2 more | 1993-02-16 |