Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Particle monitoring sensor

Particle monitoring sensor

US Patent 5463460 · Granted Oct 31, 1995

Estimated economic value: $51,053,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Single wafer dryer and drying methods2011
Apparatus for cleaning and drying substrates2010
Single wafer dryer and drying methods2009
Apparatus for cleaning and drying substrates2007
Single wafer dryer and drying methods2005
Apparatus for cleaning and drying substrates2004
Dual cassette load lock2003
Method and apparatus for cleaning/drying hydrophobic wafers2002
Method for managing a fluid level associated with a substrate processing tank2002
Megasonic resonator for disk cleaning and method for use thereof2002
Dual cassette load lock2002
Dual cassette load lock2002