Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475335 | RF plasma reactor with hybrid conductor and multi-radius dome ceiling | Gerald Yin, Peter Loewenhardt, Philip M. Salzman, Allen Zhao, Hiroji Hanawa | 2002-11-05 |
| 6270617 | RF plasma reactor with hybrid conductor and multi-radius dome ceiling | Gerald Yin, Peter Loewenhardt, Philip M. Salzman, Allen Zhao, Hiroji Hanawa | 2001-08-07 |
| 5753044 | RF plasma reactor with hybrid conductor and multi-radius dome ceiling | Hiroji Hanawa, Gerald Yin, Phil Salzman, Peter Loewenhardt, Allen Zhao | 1998-05-19 |
| 5540824 | Plasma reactor with multi-section RF coil and isolated conducting lid | Gerald Yin, Hiroji Hanawa, Donald Olgado | 1996-07-30 |