Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10333104 | Method and apparatus for encapsulation of an organic light emitting diode | Kam S. Law, Craig L. Stevens | 2019-06-25 |
| 9287152 | Auto-sequencing multi-directional inline processing method | Wendell T. Blonigan, Kam S. Law, David E. Berkstresser, Steve Kleinke, Craig L. Stevens | 2016-03-15 |
| 8998552 | Processing apparatus and processing method | Linh X. Can | 2015-04-07 |
| 8672603 | Auto-sequencing inline processing apparatus | Wendell T. Blonigan, Kam S. Law, David E. Berkstresser, Steve Kleinke, Craig L. Stevens | 2014-03-18 |
| 8617349 | Showerhead assembly for plasma processing chamber | Kam S. Law, Wendell T. Blonigan, Linh X. Can, Robin Law | 2013-12-31 |
| 8444364 | Auto-sequencing multi-directional inline processing apparatus | Wendell T. Blonigan, Kam S. Law, David E. Berkstresser, Steve Kleinke, Craig L. Stevens | 2013-05-21 |
| 7695233 | Substrate processing apparatus | — | 2010-04-13 |
| 6860710 | Lifting mechanism for integrated circuit fabrication systems | Linh X. Can, Jay C. Cho | 2005-03-01 |
| 6599076 | Dual cassette load lock | Phil Salzman, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +1 more | 2003-07-29 |
| 6545420 | Plasma reactor using inductive RF coupling, and processes | Kenneth S. Collins, Craig A. Roderick, John Trow, Chan-Lon Yang, Jerry Wong +6 more | 2003-04-08 |
| 6518195 | Plasma reactor using inductive RF coupling, and processes | Kenneth S. Collins, Chan-Lon Yang, Jerry Wong, Jeffrey Marks, Peter Keswick +7 more | 2003-02-11 |
| 6488807 | Magnetic confinement in a plasma reactor having an RF bias electrode | Kenneth S. Collins, Chan-Lon Yang, Jerry Wong, Jeffrey Marks, Peter Keswick +7 more | 2002-12-03 |
| 6454508 | Dual cassette load lock | Phil Salzman, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +1 more | 2002-09-24 |
| 6454519 | Dual cassette load lock | Phil Salzman, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +2 more | 2002-09-24 |
| 6352937 | Method for stripping organic based film | Shingo Kadomura, Jerry Wong | 2002-03-05 |
| 6251792 | Plasma etch processes | Kenneth S. Collins, Craig A. Roderick, John Trow, Chan-Lon Yang, Jerry Wong +7 more | 2001-06-26 |
| 6224680 | Wafer transfer system | — | 2001-05-01 |
| 6146469 | Apparatus and method for cleaning semiconductor wafers | — | 2000-11-14 |
| 6068784 | Process used in an RF coupled plasma reactor | Kenneth S. Collins, Craig A. Roderick, John Trow, Chan-Lon Yang, Jerry Wong +6 more | 2000-05-30 |
| 6028777 | High frequency power supply generator | Binh Nguyen, Hiroji Hanawa, Trung Nguyen | 2000-02-22 |
| 6007675 | Wafer transfer system and method of using the same | — | 1999-12-28 |
| 5944940 | Wafer transfer system and method of using the same | — | 1999-08-31 |
| 5900105 | Wafer transfer system and method of using the same | — | 1999-05-04 |
| 5882165 | Multiple chamber integrated process system | Dan Maydan, Sasson Somekh, David N. Wang, David Cheng, Isaac Harari +1 more | 1999-03-16 |
| 5769588 | Dual cassette load lock | Phil Salzman, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +2 more | 1998-06-23 |