Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6736931 | Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick | 2004-05-18 |
| 6634313 | High-frequency electrostatically shielded toroidal plasma and radical source | Hiroji Hanawa, Kenneth S. Collins, David Stover, Fernando Silveira | 2003-10-21 |
| 6623596 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2003-09-23 |
| 6545420 | Plasma reactor using inductive RF coupling, and processes | Kenneth S. Collins, Craig A. Roderick, Chan-Lon Yang, Jerry Wong, Jeffrey Marks +6 more | 2003-04-08 |
| 6524432 | Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2003-02-25 |
| 6518195 | Plasma reactor using inductive RF coupling, and processes | Kenneth S. Collins, Chan-Lon Yang, Jerry Wong, Jeffrey Marks, Peter Keswick +7 more | 2003-02-11 |
| 6488807 | Magnetic confinement in a plasma reactor having an RF bias electrode | Kenneth S. Collins, Chan-Lon Yang, Jerry Wong, Jeffrey Marks, Peter Keswick +7 more | 2002-12-03 |
| 6454898 | Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Eric Askarinam +5 more | 2002-09-24 |
| 6444085 | Inductively coupled RF plasma reactor having an antenna adjacent a window electrode | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick | 2002-09-03 |
| 6251792 | Plasma etch processes | Kenneth S. Collins, Craig A. Roderick, Chan-Lon Yang, Jerry Wong, Jeffrey Marks +7 more | 2001-06-26 |
| 6252354 | RF tuning method for an RF plasma reactor using frequency servoing and power, voltage, current or DI/DT control | Kenneth S. Collins, Craig A. Roderick, Douglas A. Buchberger, Jr., Viktor Shel | 2001-06-26 |
| 6165311 | Inductively coupled RF plasma reactor having an overhead solenoidal antenna | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick | 2000-12-26 |
| 6077384 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2000-06-20 |
| 6074512 | Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Eric Askarinam +5 more | 2000-06-13 |
| 6068784 | Process used in an RF coupled plasma reactor | Kenneth S. Collins, Craig A. Roderick, Chan-Lon Yang, Jerry Wong, Jeffrey Marks +6 more | 2000-05-30 |
| 6054013 | Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2000-04-25 |
| 5824607 | Plasma confinement for an inductively coupled plasma reactor | Tetsuya Ishikawa | 1998-10-20 |
| 5583737 | Electrostatic chuck usable in high density plasma | Kenneth S. Collins, Joshua Chiu-Wing Tsui, Craig A. Roderick, Nicolas Bright, Jeffrey Marks +2 more | 1996-12-10 |
| 5574410 | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Kenneth S. Collins, Craig A. Roderick, Jay D. Pinson, II, Douglas A. Buchberger, Jr., Robert HARTLAGE +1 more | 1996-11-12 |
| 5572170 | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Kenneth S. Collins, Craig A. Roderick, Jay D. Pinson, II, Douglas A. Buchberger, Jr., Robert HARTLAGE +1 more | 1996-11-05 |
| 5556501 | Silicon scavenger in an inductively coupled RF plasma reactor | Kenneth S. Collins, Craig A. Roderick, Chan-Lon Yang, Jerry Wong, Jeffrey Marks +7 more | 1996-09-17 |
| 5539609 | Electrostatic chuck usable in high density plasma | Kenneth S. Collins, Joshua Chiu-Wing Tsui, Craig A. Roderick, Nicolas Bright, Jeffrey Marks +2 more | 1996-07-23 |
| 5392018 | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Kenneth S. Collins, Craig A. Roderick, Jay D. Pinson, II, Douglas A. Buchberger, Jr., Robert HARTLAGE +1 more | 1995-02-21 |
| 5350479 | Electrostatic chuck for high power plasma processing | Kenneth S. Collins, Joshua Chiu-Wing Tsui, Craig A. Roderick, Nicolas Bright, Jeffrey Marks +1 more | 1994-09-27 |
| 5349313 | Variable RF power splitter | Kenneth S. Collins, Craig A. Roderick | 1994-09-20 |