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Inductively coupled parallel-plate plasma reactor with a conical dome |
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RF tuning method for an RF plasma reactor using frequency servoing and power, voltage, current or DI/DT control |
Kenneth S. Collins, Craig A. Roderick, Douglas A. Buchberger, Jr., John Trow |
2001-06-26 |
| 5872456 |
Apparatus for directly measuring component values within an RF circuit |
Craig A. Roderick |
1999-02-16 |
| 5790365 |
Method and apparatus for releasing a workpiece from and electrostatic chuck |
— |
1998-08-04 |
| 5585766 |
Electrically tuned matching networks using adjustable inductance elements |
— |
1996-12-17 |
| 5574410 |
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits |
Kenneth S. Collins, John Trow, Craig A. Roderick, Jay D. Pinson, II, Douglas A. Buchberger, Jr. +1 more |
1996-11-12 |
| 5572170 |
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits |
Kenneth S. Collins, John Trow, Craig A. Roderick, Jay D. Pinson, II, Douglas A. Buchberger, Jr. +1 more |
1996-11-05 |
| 5392018 |
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits |
Kenneth S. Collins, John Trow, Craig A. Roderick, Jay D. Pinson, II, Douglas A. Buchberger, Jr. +1 more |
1995-02-21 |
