Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6308654 | Inductively coupled parallel-plate plasma reactor with a conical dome | Gerhard Schneider, Andrew Nguyen, Robert Wu, Gerald Yin | 2001-10-30 |
| 6252354 | RF tuning method for an RF plasma reactor using frequency servoing and power, voltage, current or DI/DT control | Kenneth S. Collins, Craig A. Roderick, Douglas A. Buchberger, Jr., John Trow | 2001-06-26 |
| 5872456 | Apparatus for directly measuring component values within an RF circuit | Craig A. Roderick | 1999-02-16 |
| 5790365 | Method and apparatus for releasing a workpiece from and electrostatic chuck | — | 1998-08-04 |
| 5585766 | Electrically tuned matching networks using adjustable inductance elements | — | 1996-12-17 |
| 5574410 | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Kenneth S. Collins, John Trow, Craig A. Roderick, Jay D. Pinson, II, Douglas A. Buchberger, Jr. +1 more | 1996-11-12 |
| 5572170 | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Kenneth S. Collins, John Trow, Craig A. Roderick, Jay D. Pinson, II, Douglas A. Buchberger, Jr. +1 more | 1996-11-05 |
| 5392018 | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Kenneth S. Collins, John Trow, Craig A. Roderick, Jay D. Pinson, II, Douglas A. Buchberger, Jr. +1 more | 1995-02-21 |