Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7552736 | Process for wafer backside polymer removal with a ring of plasma under the wafer | Kenneth S. Collins, Hiroji Hanawa, Andrew Nguyen, Ajit Balakrishna, David Palagashvili +7 more | 2009-06-30 |
| 6962644 | Tandem etch chamber plasma processing system | Alexander Paterson, Valentin Todorov, Jon McChesney, David Palagashvili, John Holland +1 more | 2005-11-08 |
| 6917755 | Substrate support | Andrew Nguyen, Akihiro Hosokawa, Takayuki Matsumoto | 2005-07-12 |
| 6454898 | Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Eric Askarinam +5 more | 2002-09-24 |
| 6364957 | Support assembly with thermal expansion compensation | Hamid Noorbakhsh, Bryan Pu, Kaushik Vaidya, Brad L. Mays, Hung Dao +2 more | 2002-04-02 |
| 6308654 | Inductively coupled parallel-plate plasma reactor with a conical dome | Viktor Shel, Andrew Nguyen, Robert Wu, Gerald Yin | 2001-10-30 |
| 6263829 | Process chamber having improved gas distributor and method of manufacture | Edwin C. Weldon | 2001-07-24 |
| 6261408 | Method and apparatus for semiconductor processing chamber pressure control | Andrew Nguyen | 2001-07-17 |
| 6220607 | Thermally conductive conformal media | Edwin C. Weldon, Ananda H. Kumar, Kadthala Ramaya Narendrnath | 2001-04-24 |
| 6151203 | Connectors for an electrostatic chuck and combination thereof | Shamouil Shamouilian, Ananda H. Kumar, Arnold Kholodenko, Dennis S. Grimard, Liang Wang +4 more | 2000-11-21 |
| 6095083 | Vacuum processing chamber having multi-mode access | Michael R. Rice, Eric Askarinam, Kenneth S. Collins | 2000-08-01 |
| 6074512 | Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Eric Askarinam +5 more | 2000-06-13 |
| 6056267 | Isolation valve with extended seal life | — | 2000-05-02 |