| 7552736 |
Process for wafer backside polymer removal with a ring of plasma under the wafer |
Kenneth S. Collins, Hiroji Hanawa, Andrew Nguyen, Ajit Balakrishna, David Palagashvili +7 more |
2009-06-30 |
| 6962644 |
Tandem etch chamber plasma processing system |
Alexander Paterson, Valentin Todorov, Jon McChesney, David Palagashvili, John Holland +1 more |
2005-11-08 |
| 6917755 |
Substrate support |
Andrew Nguyen, Akihiro Hosokawa, Takayuki Matsumoto |
2005-07-12 |
| 6454898 |
Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners |
Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Eric Askarinam +5 more |
2002-09-24 |
| 6364957 |
Support assembly with thermal expansion compensation |
Hamid Noorbakhsh, Bryan Pu, Kaushik Vaidya, Brad L. Mays, Hung Dao +2 more |
2002-04-02 |
| 6308654 |
Inductively coupled parallel-plate plasma reactor with a conical dome |
Viktor Shel, Andrew Nguyen, Robert Wu, Gerald Yin |
2001-10-30 |
| 6263829 |
Process chamber having improved gas distributor and method of manufacture |
Edwin C. Weldon |
2001-07-24 |
| 6261408 |
Method and apparatus for semiconductor processing chamber pressure control |
Andrew Nguyen |
2001-07-17 |
| 6220607 |
Thermally conductive conformal media |
Edwin C. Weldon, Ananda H. Kumar, Kadthala Ramaya Narendrnath |
2001-04-24 |
| 6151203 |
Connectors for an electrostatic chuck and combination thereof |
Shamouil Shamouilian, Ananda H. Kumar, Arnold Kholodenko, Dennis S. Grimard, Liang Wang +4 more |
2000-11-21 |
| 6095083 |
Vacuum processing chamber having multi-mode access |
Michael R. Rice, Eric Askarinam, Kenneth S. Collins |
2000-08-01 |
| 6074512 |
Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners |
Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Eric Askarinam +5 more |
2000-06-13 |
| 6056267 |
Isolation valve with extended seal life |
— |
2000-05-02 |
