Issued Patents All Time
Showing 25 most recent of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133201 | High definition heater system having a fluid medium | Kevin Smith, Kevin Ptasienski, Ray Alan Derler, Cal T. Swanson, Philip S. Schmidt +5 more | 2021-09-28 |
| 10734256 | High definition heater and method of operation | Kevin Ptasienski, Kevin Smith, Cal T. Swanson, Philip S. Schmidt, Mohammad Nosrati +4 more | 2020-08-04 |
| 10361103 | High definition heater system having a fluid medium | Kevin Smith, Kevin Ptasienski, Ray Alan Derler, Cal T. Swanson, Philip S. Schmidt +5 more | 2019-07-23 |
| 10043685 | High definition heater and method of operation | Kevin Ptasienski, Kevin Smith, Cal T. Swanson, Philip S. Schmidt, Mohammad Nosrati +4 more | 2018-08-07 |
| 9553006 | High definition heater system having a fluid medium | Kevin Ptasienski, Kevin Smith, Cal T. Swanson, Philip S. Schmidt, Mohammad Nosrati +4 more | 2017-01-24 |
| 9263305 | High definition heater and method of operation | Kevin Ptasienski, Kevin Smith, Cal T. Swanson, Philip S. Schmidt, Mohammad Nosrati +4 more | 2016-02-16 |
| 8363378 | Method for optimized removal of wafer from electrostatic chuck | Terry Bluck, Hizam Sahibudeen | 2013-01-29 |
| 7838430 | Plasma control using dual cathode frequency mixing | Steven C. Shannon, Theodoros Panagopoulos, Daniel J. Hoffman, Michael G. Chafin, Troy S. Detrick +4 more | 2010-11-23 |
| 7813103 | Time-based wafer de-chucking from an electrostatic chuck having separate RF BIAS and DC chucking electrodes | Steven C. Shannon, Michael G. Chafin | 2010-10-12 |
| 7510665 | Plasma generation and control using dual frequency RF signals | Steven C. Shannon, Alexander Paterson, Theodoros Panagopoulos, John Holland, Daniel J. Hoffman | 2009-03-31 |
| 7431857 | Plasma generation and control using a dual frequency RF source | Steven C. Shannon, Alex Paterson, Theodoros Panagopoulos, John Holland, Yashushi Takakura | 2008-10-07 |
| 6795292 | Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber | Arnold Kholodenko, Alex Veytser, Senh Thach, Wing Cheng | 2004-09-21 |
| 6736668 | High temperature electrical connector | Arnold Kholodenko, Senh Thach, Wing Cheng, Alvin Lau | 2004-05-18 |
| 6721162 | Electrostatic chuck having composite dielectric layer and method of manufacture | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2004-04-13 |
| 6642489 | Method and apparatus for improving exhaust gas consumption in an exhaust conduit | Kartik Ramaswamy, Philip M. Salzman, Liang Wang, Kwok Manus Wong | 2003-11-04 |
| 6581275 | Fabricating an electrostatic chuck having plasma resistant gas conduits | Kadthala Ramaya Narendrnath, Shamouil Shamouilian | 2003-06-24 |
| 6538872 | Electrostatic chuck having heater and method | You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi +4 more | 2003-03-25 |
| 6494958 | Plasma chamber support with coupled electrode | Shamouil Shamouilian, Jon McChesney, Kwok Manus Wong, Liang Wang, Alexander Veytser | 2002-12-17 |
| 6490144 | Support for supporting a substrate in a process chamber | Kadthala Ramaya Narendrnath, Syed H. Askari, Surinder Bedi, Ananda H. Kumar, Shamouil Shamouilian | 2002-12-03 |
| 6490146 | Electrostatic chuck bonded to base with a bond layer and method | You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi +4 more | 2002-12-03 |
| 6478924 | Plasma chamber support having dual electrodes | Shamouil Shamouilian, Arnold Kholodenko, Kwok Manus Wong, Liang Wang, Alexander Veytser | 2002-11-12 |
| 6462928 | Electrostatic chuck having improved electrical connector and method | Shamouil Shamouilian, You Wang, Surinder Bedi, Arnold Kholodenko, Alexander Veytser +4 more | 2002-10-08 |
| 6454898 | Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Eric Askarinam +5 more | 2002-09-24 |
| 6414834 | Dielectric covered electrostatic chuck | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2002-07-02 |
| 6320736 | Chuck having pressurized zones of heat transfer gas | Shamouil Shamouilian, Arnold Kholodenko, Siamak Salimian, Hamid Noorbakhsh, Efrain Quiles | 2001-11-20 |