| 7582167 |
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support |
Andrzej Kaszuba, Sophia M. Velastegui, Visweswaren Sivaramakrishnan, Pyongwon Yim, Mario David Silvetti +2 more |
2009-09-01 |
| 7279049 |
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support |
Andrzej Kaszuba, Sophia M. Velastegui, Visweswaren Sivaramakrishnan, Pyongwon Yim, Mario David Silvetti +2 more |
2007-10-09 |
| 7107125 |
Method and apparatus for monitoring the position of a semiconductor processing robot |
Pyongwon Yim, Satish Sundar, Vinay Shah, Mario David Silvetti, Douglas Kitajima +3 more |
2006-09-12 |
| 6913670 |
Substrate support having barrier capable of detecting fluid leakage |
Kadthala Ramaya Narendrnath, Michael Douglas |
2005-07-05 |
| 6538872 |
Electrostatic chuck having heater and method |
You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Kadthala Ramaya Narendrnath +4 more |
2003-03-25 |
| 6490146 |
Electrostatic chuck bonded to base with a bond layer and method |
You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Kadthala Ramaya Narendrnath +4 more |
2002-12-03 |
| 6490144 |
Support for supporting a substrate in a process chamber |
Kadthala Ramaya Narendrnath, Syed H. Askari, Dennis S. Grimard, Ananda H. Kumar, Shamouil Shamouilian |
2002-12-03 |
| 6462928 |
Electrostatic chuck having improved electrical connector and method |
Shamouil Shamouilian, You Wang, Arnold Kholodenko, Alexander Veytser, Kadthala Ramaya Narendrnath +4 more |
2002-10-08 |
| 6310755 |
Electrostatic chuck having gas cavity and method |
Arnold Kholodenko, Shamouil Shamouilian, You Wang, Wing Cheng, Alexander Veytser +4 more |
2001-10-30 |
| 6278600 |
Electrostatic chuck with improved temperature control and puncture resistance |
Shamouil Shamouilian, Arnold Kholodenko, Semyon L. Kats, Semyon Sherstinsky, Jon Clinton |
2001-08-21 |
| 6094334 |
Polymer chuck with heater and method of manufacture |
Shamouil Shamouilian, Syed H. Askari, Arnold Kholodenko, Jon Clinton, Alexander Veytser +2 more |
2000-07-25 |
| 6055150 |
Multi-electrode electrostatic chuck having fuses in hollow cavities |
Jon Clinton, Mark Contreras, Anand KUMAR, Shamouil Shamouilian, You Wang |
2000-04-25 |
| 5986875 |
Puncture resistant electrostatic chuck |
Arik Donde, Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Edwin C. Weldon +2 more |
1999-11-16 |
| 5729423 |
Puncture resistant electrostatic chuck |
Arik Donde, Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Edwin C. Weldon +2 more |
1998-03-17 |
