Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7582167 | Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support | Andrzej Kaszuba, Sophia M. Velastegui, Visweswaren Sivaramakrishnan, Pyongwon Yim, Mario David Silvetti +2 more | 2009-09-01 |
| 7279049 | Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support | Andrzej Kaszuba, Sophia M. Velastegui, Visweswaren Sivaramakrishnan, Pyongwon Yim, Mario David Silvetti +2 more | 2007-10-09 |
| 7107125 | Method and apparatus for monitoring the position of a semiconductor processing robot | Pyongwon Yim, Satish Sundar, Vinay Shah, Mario David Silvetti, Douglas Kitajima +3 more | 2006-09-12 |
| 6913670 | Substrate support having barrier capable of detecting fluid leakage | Kadthala Ramaya Narendrnath, Michael Douglas | 2005-07-05 |
| 6538872 | Electrostatic chuck having heater and method | You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Kadthala Ramaya Narendrnath +4 more | 2003-03-25 |
| 6490146 | Electrostatic chuck bonded to base with a bond layer and method | You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Kadthala Ramaya Narendrnath +4 more | 2002-12-03 |
| 6490144 | Support for supporting a substrate in a process chamber | Kadthala Ramaya Narendrnath, Syed H. Askari, Dennis S. Grimard, Ananda H. Kumar, Shamouil Shamouilian | 2002-12-03 |
| 6462928 | Electrostatic chuck having improved electrical connector and method | Shamouil Shamouilian, You Wang, Arnold Kholodenko, Alexander Veytser, Kadthala Ramaya Narendrnath +4 more | 2002-10-08 |
| 6310755 | Electrostatic chuck having gas cavity and method | Arnold Kholodenko, Shamouil Shamouilian, You Wang, Wing Cheng, Alexander Veytser +4 more | 2001-10-30 |
| 6278600 | Electrostatic chuck with improved temperature control and puncture resistance | Shamouil Shamouilian, Arnold Kholodenko, Semyon L. Kats, Semyon Sherstinsky, Jon Clinton | 2001-08-21 |
| 6094334 | Polymer chuck with heater and method of manufacture | Shamouil Shamouilian, Syed H. Askari, Arnold Kholodenko, Jon Clinton, Alexander Veytser +2 more | 2000-07-25 |
| 6055150 | Multi-electrode electrostatic chuck having fuses in hollow cavities | Jon Clinton, Mark Contreras, Anand KUMAR, Shamouil Shamouilian, You Wang | 2000-04-25 |
| 5986875 | Puncture resistant electrostatic chuck | Arik Donde, Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Edwin C. Weldon +2 more | 1999-11-16 |
| 5729423 | Puncture resistant electrostatic chuck | Arik Donde, Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Edwin C. Weldon +2 more | 1998-03-17 |