Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6055150 | Multi-electrode electrostatic chuck having fuses in hollow cavities | Jon Clinton, Anand KUMAR, Shamouil Shamouilian, You Wang, Surinder Bedi | 2000-04-25 | $129,479,000 |
| 5737177 | Apparatus and method for actively controlling the DC potential of a cathode pedestal | Richard R. Mett, Mahmoud Dahimene, Paul Luscher, Siamak Salimian | 1998-04-07 | $41,118,000 |