Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6055150 | Multi-electrode electrostatic chuck having fuses in hollow cavities | Jon Clinton, Anand KUMAR, Shamouil Shamouilian, You Wang, Surinder Bedi | 2000-04-25 |
| 5737177 | Apparatus and method for actively controlling the DC potential of a cathode pedestal | Richard R. Mett, Mahmoud Dahimene, Paul Luscher, Siamak Salimian | 1998-04-07 |