Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7374636 | Method and apparatus for providing uniform plasma in a magnetic field enhanced plasma reactor | Keiji Horioka, Chun Yan, Taeho Shin, Roger Alan Lindley, Panyin Hughes +4 more | 2008-05-20 |
| 7316761 | Apparatus for uniformly etching a dielectric layer | Kenny L. Doan, Yunsang Kim, Jingbao Liu, Bryan Pu, Hongqing Shan +1 more | 2008-01-08 |
| 6921727 | Method for modifying dielectric characteristics of dielectric layers | Kang-Lie Chiang, Xiaoye Zhao, Yan Ye, Gerardo Delgadino, Hoiman Hung +2 more | 2005-07-26 |
| 6734120 | Method of photoresist ash residue removal | Ivan L. Berry, III, Stuart Rounds, John Scott Hallock, Michael W. Owens | 2004-05-11 |
| 6638875 | Oxygen free plasma stripping process | Qingyan Han, Ivan L. Berry, III, Palani Sakthivel, Ricky Ruffin | 2003-10-28 |
| 6406836 | Method of stripping photoresist using re-coating material | Robert Douglas Mohondro, Qingyuan Han, Ivan L. Berry, III, Stuart Rounds | 2002-06-18 |
| 6273958 | Substrate support for plasma processing | Shamouil Shamouilian, Ananda H. Kumar, Siamak Salimian, Michael G. Chafin, Dennis S. Grimard | 2001-08-14 |
| 6198616 | Method and apparatus for supplying a chucking voltage to an electrostatic chuck within a semiconductor wafer processing system | Richard R. Mett, Siamak Salimian | 2001-03-06 |
| 6005376 | DC power supply | Richard R. Mett, Siamak Salimian | 1999-12-21 |
| 5737177 | Apparatus and method for actively controlling the DC potential of a cathode pedestal | Richard R. Mett, Paul Luscher, Siamak Salimian, Mark Contreras | 1998-04-07 |
| 4727293 | Plasma generating apparatus using magnets and method | Jes Asmussen, Donnie K. Reinhard | 1988-02-23 |