Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770321 | Process kit erosion and service life prediction | Greg Blackburn, Pallavi Zhang, Michael D. Armacost, Nitin Khurana | 2020-09-08 |
| 10177018 | Process kit erosion and service life prediction | Greg Blackburn, Pallavi Zhang, Michael D. Armacost, Nitin Khurana | 2019-01-08 |
| 9281190 | Local and global reduction of critical dimension (CD) asymmetry in etch processing | Olivier Luere, Jinhan Choi | 2016-03-08 |
| 7981812 | Methods for forming ultra thin structures on a substrate | Chia-Ling Kao | 2011-07-19 |
| 7186943 | MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Yan Ye, Dan Katz, Douglas A. Buchberger, Jr., Xiaoye Zhao +2 more | 2007-03-06 |
| 7132618 | MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Yan Ye, Dan Katz, Douglas A. Buchberger, Jr., Xiaoye Zhao +2 more | 2006-11-07 |
| 7030335 | Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Gerald Yin, Yan Ye, Dan Katz, Douglas A. Buchberger, Jr. +3 more | 2006-04-18 |
| 6921727 | Method for modifying dielectric characteristics of dielectric layers | Mahmoud Dahimene, Xiaoye Zhao, Yan Ye, Gerardo Delgadino, Hoiman Hung +2 more | 2005-07-26 |
| 6900596 | Capacitively coupled plasma reactor with uniform radial distribution of plasma | Jang-Gyoo Yang, Daniel J. Hoffman, James D. Carducci, Douglas A. Buchberger, Jr., Matthew L. Miller +2 more | 2005-05-31 |
| 6894245 | Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Yan Ye, Dan Katz, Douglas A. Buchberger, Jr., Xiaoye Zhao +2 more | 2005-05-17 |
| 6749770 | Method of etching an anisotropic profile in platinum | Jeng H. Hwang, Chentsau Ying, Steve S. Y. Mak | 2004-06-15 |
| 6677712 | Gas distribution plate electrode for a plasma receptor | Dan Katz, Douglas A. Buchberger, Jr., Yan Ye, Robert B. Hagen, Xiaoye Zhao +3 more | 2004-01-13 |
| 6586886 | Gas distribution plate electrode for a plasma reactor | Dan Katz, Douglas A. Buchberger, Jr., Yan Ye, Robert B. Hagen, Xiaoye Zhao +3 more | 2003-07-01 |
| 6368517 | Method for preventing corrosion of a dielectric material | Jeng H. Hwang, Guangxiang Jin | 2002-04-09 |
| 6323132 | Etching methods for anisotropic platinum profile | Jeng H. Hwang, Chentsau Ying, Steve S. Y. Mak | 2001-11-27 |