Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278110 | Bias voltage modulation approach for SiO/SiN layer alternating etch process | Sean S. Kang, Kenji Takeshita, Sanghyuk CHOI, Mengnan ZOU, Zihao Ding | 2025-04-15 |
| 12237148 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy +4 more | 2025-02-25 |
| 12094752 | Wafer edge ring lifting solution | Michael R. Rice, Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Steven E. Babayan +2 more | 2024-09-17 |
| 12057292 | Feedback loop for controlling a pulsed voltage waveform | Leonid Dorf, Evgeny Kamenetskiy, James Rogers, Rajinder Dhindsa, Viacheslav Plotnikov | 2024-08-06 |
| 11848176 | Plasma processing using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy +3 more | 2023-12-19 |
| 11776789 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy +4 more | 2023-10-03 |
| 11728124 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Joubert, Philip Allan Kraus, Rajinder Dhindsa +1 more | 2023-08-15 |
| 11699572 | Feedback loop for controlling a pulsed voltage waveform | Leonid Dorf, Evgeny Kamenetskiy, James Rogers, Rajinder Dhindsa, Viacheslav Plotnikov | 2023-07-11 |
| 11521849 | In-situ deposition process | Sang Wook Park, Sunil Srinivasan, Rajinder Dhindsa, Jonathan Kim, Lin YU +1 more | 2022-12-06 |
| 11508554 | High voltage filter assembly | Anurag Kumar Mishra, James Rogers, Leonid Dorf, Rajinder Dhindsa | 2022-11-22 |
| 11482402 | Methods and apparatus for processing a substrate | Leonid Dorf, Rajinder Dhindsa, Evgeny Kamenetskiy | 2022-10-25 |
| 11462389 | Pulsed-voltage hardware assembly for use in a plasma processing system | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy +5 more | 2022-10-04 |
| 11462388 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy +4 more | 2022-10-04 |
| 11393710 | Wafer edge ring lifting solution | Michael R. Rice, Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Steven E. Babayan +2 more | 2022-07-19 |
| 11284500 | Method of controlling ion energy distribution using a pulse generator | Leonid Dorf, Rajinder Dhindsa, James Rogers, Sunil Srinivasan, Anurag Kumar Mishra | 2022-03-22 |
| 11069504 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Joubert, Philip Allan Kraus, Rajinder Dhindsa +1 more | 2021-07-20 |
| 11049760 | Universal process kit | Olivier Joubert, Jason A. Kenney, Sunil Srinivasan, James Rogers, Rajinder Dhindsa +1 more | 2021-06-29 |
| 10991556 | Adjustable extended electrode for edge uniformity control | Leonid Dorf, Sunil Srinivasan, Rajinder Dhindsa, James Rogers, Denis M. Koosau | 2021-04-27 |
| 10923321 | Apparatus and method of generating a pulsed waveform | Leonid Dorf, Evgeny Kamenetskiy, James Rogers, Rajinder Dhindsa, Viacheslav Plotnikov | 2021-02-16 |
| 10916408 | Apparatus and method of forming plasma using a pulsed waveform | Leonid Dorf, Evgeny Kamenetskiy, James Rogers, Rajinder Dhindsa, Viacheslav Plotnikov | 2021-02-09 |
| 10791617 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Rajinder Dhindsa, James Rogers, Sunil Srinivasan, Anurag Kumar Mishra | 2020-09-29 |
| 10685807 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Joubert, Philip Allan Kraus, Rajinder Dhindsa +1 more | 2020-06-16 |
| 10553404 | Adjustable extended electrode for edge uniformity control | Leonid Dorf, Sunil Srinivasan, Rajinder Dhindsa, James Rogers, Denis M. Koosau | 2020-02-04 |
| 10555412 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Rajinder Dhindsa, James Rogers, Sunil Srinivasan, Anurag Kumar Mishra | 2020-02-04 |
| 10504702 | Adjustable extended electrode for edge uniformity control | Leonid Dorf, Rajinder Dhindsa, Sunil Srinivasan, Denis M. Koosau, James Rogers | 2019-12-10 |