Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10448494 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Rajinder Dhindsa, James Rogers, Sunil Srinivasan, Anurag Kumar Mishra | 2019-10-15 |
| 10448495 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Rajinder Dhindsa, James Rogers, Sunil Srinivasan, Anurag Kumar Mishra | 2019-10-15 |
| 10312048 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Joubert, Philip Allan Kraus, Rajinder Dhindsa +1 more | 2019-06-04 |
| 10109464 | Minimization of ring erosion during plasma processes | Olivier Joubert, Vedapuram S. Achutharaman | 2018-10-23 |
| 10103010 | Adjustable extended electrode for edge uniformity control | Leonid Dorf, Rajinder Dhindsa, Sunil Srinivasan, Denis M. Koosau, James Rogers | 2018-10-16 |
| 9947517 | Adjustable extended electrode for edge uniformity control | Leonid Dorf, Rajinder Dhindsa, Sunil Srinivasan, Denis M. Koosau, James Rogers | 2018-04-17 |
| D797691 | Composite edge ring | Olivier Joubert, Jason A. Kenney, Sunil Srinivasan, James Rogers, Rajinder Dhindsa +1 more | 2017-09-19 |
| 9520302 | Methods for controlling Fin recess loading | Jungmin Ko, Sean S. Kang, Kwang Soo Kim | 2016-12-13 |
| 9281190 | Local and global reduction of critical dimension (CD) asymmetry in etch processing | Kang-Lie Chiang, Jinhan Choi | 2016-03-08 |
| 9269590 | Spacer formation | Sean S. Kang, Srinivas D. Nemani | 2016-02-23 |