Issued Patents All Time
Showing 25 most recent of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237148 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +4 more | 2025-02-25 |
| 12057292 | Feedback loop for controlling a pulsed voltage waveform | Evgeny Kamenetskiy, James Rogers, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov | 2024-08-06 |
| 11948780 | Automatic electrostatic chuck bias compensation during plasma processing | Linying Cui, James Rogers | 2024-04-02 |
| 11935724 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more | 2024-03-19 |
| 11848176 | Plasma processing using pulsed-voltage and radio-frequency power | Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +3 more | 2023-12-19 |
| 11791138 | Automatic electrostatic chuck bias compensation during plasma processing | Linying Cui, James Rogers | 2023-10-17 |
| 11776789 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +4 more | 2023-10-03 |
| 11728124 | Creating ion energy distribution functions (IEDF) | Travis Koh, Olivier Luere, Olivier Joubert, Philip Allan Kraus, Rajinder Dhindsa +1 more | 2023-08-15 |
| 11699572 | Feedback loop for controlling a pulsed voltage waveform | Evgeny Kamenetskiy, James Rogers, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov | 2023-07-11 |
| 11668553 | Apparatus and method for controlling edge ring variation | Sathyendra Ghantasala, Evgeny Kamenetskiy, Peter Muraoka, Denis M. Koosau, Rajinder Dhindsa +1 more | 2023-06-06 |
| 11587766 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more | 2023-02-21 |
| 11508554 | High voltage filter assembly | Anurag Kumar Mishra, James Rogers, Rajinder Dhindsa, Olivier Luere | 2022-11-22 |
| 11482402 | Methods and apparatus for processing a substrate | Rajinder Dhindsa, Olivier Luere, Evgeny Kamenetskiy | 2022-10-25 |
| 11476145 | Automatic ESC bias compensation when using pulsed DC bias | James Rogers, Linying Cui | 2022-10-18 |
| 11462389 | Pulsed-voltage hardware assembly for use in a plasma processing system | Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +5 more | 2022-10-04 |
| 11462388 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +4 more | 2022-10-04 |
| 11284500 | Method of controlling ion energy distribution using a pulse generator | Olivier Luere, Rajinder Dhindsa, James Rogers, Sunil Srinivasan, Anurag Kumar Mishra | 2022-03-22 |
| 11101113 | Ion-ion plasma atomic layer etch process | Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci, Shahid Rauf, Yang Yang | 2021-08-24 |
| 11069504 | Creating ion energy distribution functions (IEDF) | Travis Koh, Olivier Luere, Olivier Joubert, Philip Allan Kraus, Rajinder Dhindsa +1 more | 2021-07-20 |
| 11043361 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more | 2021-06-22 |
| 10991556 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Sunil Srinivasan, Rajinder Dhindsa, James Rogers, Denis M. Koosau | 2021-04-27 |
| 10923321 | Apparatus and method of generating a pulsed waveform | Evgeny Kamenetskiy, James Rogers, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov | 2021-02-16 |
| 10923320 | System for tunable workpiece biasing in a plasma reactor | Travis Koh, Philip Allan Kraus, Prabu Gopalraja | 2021-02-16 |
| 10916408 | Apparatus and method of forming plasma using a pulsed waveform | Evgeny Kamenetskiy, James Rogers, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov | 2021-02-09 |
| 10791617 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Olivier Luere, Rajinder Dhindsa, James Rogers, Sunil Srinivasan, Anurag Kumar Mishra | 2020-09-29 |