Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8951384 | Electron beam plasma source with segmented beam dump for uniform plasma generation | Shahid Rauf, Kenneth S. Collins, Nipun Misra, James D. Carducci, Gary Leray +1 more | 2015-02-10 |
| 8920597 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more | 2014-12-30 |
| 8894805 | Electron beam plasma source with profiled magnet shield for uniform plasma generation | Kallol Bera, Shahid Rauf, Kenneth S. Collins, Ajit Balakrishna, Gary Leray | 2014-11-25 |
| 8313664 | Efficient and accurate method for real-time prediction of the self-bias voltage of a wafer and feedback control of ESC voltage in plasma processing chamber | Zhigang Chen, Shahid Rauf, Walter R. Merry, Kartik Ramaswamy, Kenneth S. Collins | 2012-11-20 |