Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749504 | Methods and apparatus for common excitation of frequency generators | — | 2023-09-05 |
| 11177115 | Dual-level pulse tuning | Valentin N. Todorow, James Rogers | 2021-11-16 |
| 10825708 | Process kit components for use with an extended and independent RF powered cathode substrate for extreme edge tunability | Valentin N. Todorow, Samer Banna, Imad Yousif, Albert Wang | 2020-11-03 |
| 10553400 | Methods and apparatus for frequency generator and match network communication | — | 2020-02-04 |
| 10290469 | Enhanced plasma source for a plasma reactor | Valentin N. Todorow, Michael D. Willwerth, Li-Sheng Chiang | 2019-05-14 |
| 10233912 | Electronegative plasma thruster with optimized injection | Pascal Chabert, Ane Aanesland, Albert Meige | 2019-03-19 |
| 9839109 | Dynamic control band for RF plasma current ratio control | — | 2017-12-05 |
| 9595423 | Frequency tuning for dual level radio frequency (RF) pulsing | Valentin N. Todorow | 2017-03-14 |
| 9406540 | Self-bias calculation on a substrate in a process chamber with bias power for single or multiple frequencies | Valentin N. Todorow, Samer Banna | 2016-08-02 |
| 9318304 | Frequency tuning for dual level radio frequency (RF) pulsing | Valentin N. Todorow | 2016-04-19 |
| 9190247 | Measurement of plural RF sensor devices in a pulsed RF plasma reactor | — | 2015-11-17 |
| 9129777 | Electron beam plasma source with arrayed plasma sources for uniform plasma generation | Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Nipun Misra, James D. Carducci +1 more | 2015-09-08 |
| 8988848 | Extended and independent RF powered cathode substrate for extreme edge tunability | Valentin N. Todorow, Samer Banna, Imad Yousif, Albert Wang | 2015-03-24 |
| 8951384 | Electron beam plasma source with segmented beam dump for uniform plasma generation | Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Nipun Misra, James D. Carducci +1 more | 2015-02-10 |
| 8894805 | Electron beam plasma source with profiled magnet shield for uniform plasma generation | Kallol Bera, Shahid Rauf, Leonid Dorf, Kenneth S. Collins, Ajit Balakrishna | 2014-11-25 |
| 8773020 | Apparatus for forming a magnetic field and methods of use thereof | Shahid Rauf, Valentin N. Todorow | 2014-07-08 |