| 11749504 |
Methods and apparatus for common excitation of frequency generators |
— |
2023-09-05 |
| 11177115 |
Dual-level pulse tuning |
Valentin N. Todorow, James Rogers |
2021-11-16 |
| 10825708 |
Process kit components for use with an extended and independent RF powered cathode substrate for extreme edge tunability |
Valentin N. Todorow, Samer Banna, Imad Yousif, Albert Wang |
2020-11-03 |
| 10553400 |
Methods and apparatus for frequency generator and match network communication |
— |
2020-02-04 |
| 10290469 |
Enhanced plasma source for a plasma reactor |
Valentin N. Todorow, Michael D. Willwerth, Li-Sheng Chiang |
2019-05-14 |
| 10233912 |
Electronegative plasma thruster with optimized injection |
Pascal Chabert, Ane Aanesland, Albert Meige |
2019-03-19 |
| 9839109 |
Dynamic control band for RF plasma current ratio control |
— |
2017-12-05 |
| 9595423 |
Frequency tuning for dual level radio frequency (RF) pulsing |
Valentin N. Todorow |
2017-03-14 |
| 9406540 |
Self-bias calculation on a substrate in a process chamber with bias power for single or multiple frequencies |
Valentin N. Todorow, Samer Banna |
2016-08-02 |
| 9318304 |
Frequency tuning for dual level radio frequency (RF) pulsing |
Valentin N. Todorow |
2016-04-19 |
| 9190247 |
Measurement of plural RF sensor devices in a pulsed RF plasma reactor |
— |
2015-11-17 |
| 9129777 |
Electron beam plasma source with arrayed plasma sources for uniform plasma generation |
Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Nipun Misra, James D. Carducci +1 more |
2015-09-08 |
| 8988848 |
Extended and independent RF powered cathode substrate for extreme edge tunability |
Valentin N. Todorow, Samer Banna, Imad Yousif, Albert Wang |
2015-03-24 |
| 8951384 |
Electron beam plasma source with segmented beam dump for uniform plasma generation |
Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Nipun Misra, James D. Carducci +1 more |
2015-02-10 |
| 8894805 |
Electron beam plasma source with profiled magnet shield for uniform plasma generation |
Kallol Bera, Shahid Rauf, Leonid Dorf, Kenneth S. Collins, Ajit Balakrishna |
2014-11-25 |
| 8773020 |
Apparatus for forming a magnetic field and methods of use thereof |
Shahid Rauf, Valentin N. Todorow |
2014-07-08 |
