Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195839 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Ying Zhang | 2025-01-14 |
| 11566318 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Ying Zhang | 2023-01-31 |
| 11566319 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Ying Zhang | 2023-01-31 |
| 11566317 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Ying Zhang | 2023-01-31 |
| 11049760 | Universal process kit | Olivier Joubert, Jason A. Kenney, Sunil Srinivasan, James Rogers, Rajinder Dhindsa +1 more | 2021-06-29 |
| 10109464 | Minimization of ring erosion during plasma processes | Olivier Joubert, Olivier Luere | 2018-10-23 |
| 9797037 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Ying Zhang | 2017-10-24 |
| D797691 | Composite edge ring | Olivier Joubert, Jason A. Kenney, Sunil Srinivasan, James Rogers, Rajinder Dhindsa +1 more | 2017-09-19 |
| 9725799 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Ying Zhang | 2017-08-08 |
| 8497193 | Method of thermally treating silicon with oxygen | Yoshitaka Yokota, Sundar Ramamurthy, Cory Czarnik, Mehran Behdjat, Christopher S. Olsen | 2013-07-30 |
| 8409353 | Water cooled gas injector | Yoshitaka Yokota, Sundar Ramamurthy, Cory Czarnik, Mehran Behdjat, Christopher S. Olsen | 2013-04-02 |
| 8288683 | Fast axis beam profile shaping for high power laser diode based annealing system | Dean Jennings, Abhilash J. Mayur, Timothy N. Thomas, Vijay Parihar, Randhir P. S. Thakur | 2012-10-16 |
| 8110828 | Real time process monitoring and control for semiconductor junctions | Wen Chang, Tarpan Dixit, Philip Allan Kraus | 2012-02-07 |
| 7972441 | Thermal oxidation of silicon using ozone | Yoshitaka Yokota, Sundar Ramamurthy, Cory Czarnik, Mehran Behdjat, Christopher S. Olsen | 2011-07-05 |
| 7964418 | Real time process monitoring and control for semiconductor junctions | Wen Chang, Tarpan Dixit, Philip Allan Kraus | 2011-06-21 |
| 7674999 | Fast axis beam profile shaping by collimation lenslets for high power laser diode based annealing system | Dean Jennings, Abhilash J. Mayur, Timothy N. Thomas, Vijay Parihar, Randhir P. S. Thakur | 2010-03-09 |
| 7241345 | Cylinder for thermal processing chamber | Sundar Ramamurthy, Ho Fang | 2007-07-10 |
| 6916744 | Method and apparatus for planarization of a material by growing a sacrificial film with customized thickness profile | Juan Chacin, Hali Forstner | 2005-07-12 |
| 6888104 | Thermally matched support ring for substrate processing chamber | Joseph M. Ranish, Aaron Muir Hunter, Balasubramanian Ramachandran, Jallepally Ravi, Sundar Ramamurthy +1 more | 2005-05-03 |
| 6284650 | Integrated tungsten-silicide processes | Cory Czarnik, Mahalingam Venkatesan, Klaus-Dieter Rinnen | 2001-09-04 |
| 6022587 | Method and apparatus for improving film deposition uniformity on a substrate | H. Peter W. Hey, Johanes F. Swenberg | 2000-02-08 |
| 6019839 | Method and apparatus for forming an epitaxial titanium silicide film by low pressure chemical vapor deposition | Johanes F. Swenberg | 2000-02-01 |
| 5863598 | Method of forming doped silicon in high aspect ratio openings | Mahalingam Venkatesan, Shulin Wang | 1999-01-26 |