Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11416977 | Self-measurement of semiconductor image using deep learning | Abhinav Kumar | 2022-08-16 |
| 8110828 | Real time process monitoring and control for semiconductor junctions | Vedapuram S. Achutharaman, Wen Chang, Philip Allan Kraus | 2012-02-07 |
| 7964418 | Real time process monitoring and control for semiconductor junctions | Vedapuram S. Achutharaman, Wen Chang, Philip Allan Kraus | 2011-06-21 |
| 7398693 | Adaptive control method for rapid thermal processing of a substrate | Joseph M. Ranish, Dean Jennings, Balasubramanian Ramachandran, Aaron Muir Hunter, Wolfgang Aderhold +2 more | 2008-07-15 |
| 7112763 | Method and apparatus for low temperature pyrometry useful for thermally processing silicon wafers | Aaron Muir Hunter, Rajesh S. Ramanujam, Balasubramanian Ramachandran, Corina E. Tanasa | 2006-09-26 |