Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6284650 | Integrated tungsten-silicide processes | Cory Czarnik, Vedapuram S. Achutharaman, Mahalingam Venkatesan | 2001-09-04 |
| 6193813 | Utilization of SiH4 soak and purge in deposition processes | Meng Chu Tseng, Mei Chang, Ramanujapuram A. Srinivas, Moshe Eizenberg, Susan Telford | 2001-02-27 |
| 5997950 | Substrate having uniform tungsten silicide film and method of manufacture | Susan G. Telford, Meng Chu Tseng, Michio Aruga | 1999-12-07 |
| 5943230 | Computer-implemented inter-chamber synchronization in a multiple chamber substrate processing system | Cory Czarnik | 1999-08-24 |
| 5817576 | Utilization of SiH.sub.4 soak and purge in deposition processes | Meng Chu Tseng, Mei Chang, Ramanujapuram A. Srinivas, Moshe Eizenberg, Susan Telford | 1998-10-06 |
| 5780360 | Purge in silicide deposition processes dichlorosilane | Jennifer Meng Chu Tseng, Mei Chang, Ramanujapuram A. Srinivas, Moshe Eizenberg, Susan Telford | 1998-07-14 |