Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9076661 | Methods for manganese nitride integration | Paul F. Ma, Mei Chang, Annamalai Lakshmanan, Jing Tang | 2015-07-07 |
| 6645550 | Method of treating a substrate | Robin Cheung, Yezdi Dordi | 2003-11-11 |
| 6291343 | Plasma annealing of substrates to improve adhesion | Mei Chang, Ling Chen, David Charles Smith, Karl A. Littau, Chyi Chern +1 more | 2001-09-18 |
| 5834068 | Wafer surface temperature control for deposition of thin films | Chyi Chern, Wei-Min Chen, Marvin Liao, Mei Chang | 1998-11-10 |
| 5780360 | Purge in silicide deposition processes dichlorosilane | Mei Chang, Ramanujapuram A. Srinivas, Klaus-Dieter Rinnen, Moshe Eizenberg, Susan Telford | 1998-07-14 |