Issued Patents All Time
Showing 25 most recent of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371781 | In situ protective coating of chamber components for semiconductor processing | Akhil Singhal, Karl Leeser | 2025-07-29 |
| 12248252 | Bubble defect reduction | Akhil Singhal, Bart J. van Schravendijk, Girish Dixit, Siva Kanakasabapathy | 2025-03-11 |
| 12051589 | Tin oxide thin film spacers in semiconductor device manufacturing | Richard Wise, Arpan Mahorowala, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2024-07-30 |
| 11784047 | Tin oxide thin film spacers in semiconductor device manufacturing | Richard Wise, Arpan Mahorowala, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2023-10-10 |
| 11183383 | Tin oxide thin film spacers in semiconductor device manufacturing | Richard Wise, Arpan Mahorowala, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2021-11-23 |
| 11127567 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Shankar Swaminathan, Jun Qian, Chloe Baldasseroni +8 more | 2021-09-21 |
| 11107683 | Selective growth of metal-containing hardmask thin films | Jon Henri, Dennis M. Hausmann, Paul C. Lemaire | 2021-08-31 |
| 11031245 | Tin oxide thin film spacers in semiconductor device manufacturing | Richard Wise, Arpan Mahorowala, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2021-06-08 |
| 10998187 | Selective deposition with atomic layer etch reset | Kapu Sirish Reddy, Meliha Gozde Rainville, Nagraj Shankar, Dennis M. Hausmann, Karthik Sivaramakrishnan +1 more | 2021-05-04 |
| 10903071 | Selective deposition of silicon oxide | Dennis M. Hausmann | 2021-01-26 |
| 10843618 | Conformality modulation of metal oxide films using chemical inhibition | Dennis M. Hausmann | 2020-11-24 |
| 10777407 | Selective deposition of silicon nitride on silicon oxide using catalytic control | Dennis M. Hausmann | 2020-09-15 |
| 10763108 | Geometrically selective deposition of a dielectric film | Dennis M. Hausmann, Alexander R. Fox, Bart J. van Schravendijk | 2020-09-01 |
| 10692724 | Atomic layer etching methods and apparatus | Thorsten Lill, Andreas Fischer | 2020-06-23 |
| 10662526 | Method for selective deposition using a base-catalyzed inhibitor | Dennis M. Hausmann, Alexander R. Fox, Paul C. Lemaire | 2020-05-26 |
| 10665429 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Shankar Swaminathan, Jun Qian, Chloe Baldasseroni +8 more | 2020-05-26 |
| 10643889 | Pre-treatment method to improve selectivity in a selective deposition process | Dennis M. Hausmann, Elham Mohimi, Pengyi Zhang, Paul C. Lemaire, Kashish Sharma +3 more | 2020-05-05 |
| 10643846 | Selective growth of metal-containing hardmask thin films | Jon Henri, Dennis M. Hausmann, Paul C. Lemaire | 2020-05-05 |
| 10629429 | Selective deposition of silicon oxide | Dennis M. Hausmann | 2020-04-21 |
| 10559461 | Selective deposition with atomic layer etch reset | Kapu Sirish Reddy, Meliha Gozde Rainville, Nagraj Shankar, Dennis M. Hausmann, Karthik Sivaramakrishnan +1 more | 2020-02-11 |
| 10526700 | Hardware and process for film uniformity improvement | Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale +5 more | 2020-01-07 |
| 10490413 | Selective growth of silicon nitride | Dennis M. Hausmann | 2019-11-26 |
| 10242866 | Selective deposition of silicon nitride on silicon oxide using catalytic control | Dennis M. Hausmann | 2019-03-26 |
| 10199212 | Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide | Dennis M. Hausmann | 2019-02-05 |
| 10176984 | Selective deposition of silicon oxide | Dennis M. Hausmann | 2019-01-08 |