Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128116 | Integrated direct dielectric and metal deposition | William T. Lee, Bart J. van Schravendijk, Michal Danek, Patrick A. Van Cleemput, Ramesh Chandrasekharan | 2018-11-13 |
| 10100407 | Hardware and process for film uniformity improvement | Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale +5 more | 2018-10-16 |
| 10043656 | Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide | Dennis M. Hausmann | 2018-08-07 |
| 9996004 | EUV photopatterning of vapor-deposited metal oxide-containing hardmasks | Dennis M. Hausmann | 2018-06-12 |
| 9970108 | Systems and methods for vapor delivery in a substrate processing system | Jun Qian, Hu Kang, Purushottam Kumar, Chloe Baldasseroni, Heather Landis +11 more | 2018-05-15 |
| 9966299 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Wei Tang, Bart J. van Schravendijk, Jun Qian, Hu Kang, Adrien LaVoie +1 more | 2018-05-08 |
| 9911595 | Selective growth of silicon nitride | Dennis M. Hausmann | 2018-03-06 |
| 9824893 | Tin oxide thin film spacers in semiconductor device manufacturing | Richard Wise, Arpan Mahorowala, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2017-11-21 |
| 9793096 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Shankar Swaminathan, Jun Qian, Chloe Baldasseroni +8 more | 2017-10-17 |
| 9624578 | Method for RF compensation in plasma assisted atomic layer deposition | Jun Qian, Frank L. Pasquale, Adrien LaVoie, Chloe Baldasseroni, Hu Kang +7 more | 2017-04-18 |
| 9425078 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Wei Tang, Bart J. van Schravendijk, Jun Qian, Hu Kang, Adrien LaVoie +1 more | 2016-08-23 |
| 8960085 | Camera for monitoring functions of a round baler | Alexander Cook | 2015-02-24 |
| 8811812 | Camera rig | Michael Shawn Lawler | 2014-08-19 |
| 7755536 | Method of signal processing for determining range and velocity of an object | Douglas J. Nelson | 2010-07-13 |
| D615570 | Conditioning roll | Allan Wesley Rosenbalm, Jason C. Eubanks, Charles S. Sloan | 2010-05-11 |
| 7676046 | Method of removing noise and interference from signal | Douglas J. Nelson | 2010-03-09 |
| 7545325 | Method of signal processing | Douglas J. Nelson | 2009-06-09 |
| 7457756 | Method of generating time-frequency signal representation preserving phase information | Douglas J. Nelson | 2008-11-25 |
| 7127392 | Device for and method of detecting voice activity | — | 2006-10-24 |
| 6556967 | Voice activity detector | Douglas J. Nelson, Jeffrey L. Townsend | 2003-04-29 |
| 6500742 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Roderick C. Mosely, Karl A. Littau +1 more | 2002-12-31 |
| 6444036 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Roderick C. Mosely, Karl A. Littau +1 more | 2002-09-03 |
| 6309713 | Deposition of tungsten nitride by plasma enhanced chemical vapor deposition | Alfred Mak, Ling Chen, Mei Chang, Steve Ghanayem | 2001-10-30 |
| 6291343 | Plasma annealing of substrates to improve adhesion | Jennifer Meng Chu Tseng, Mei Chang, Ling Chen, Karl A. Littau, Chyi Chern +1 more | 2001-09-18 |
| 6251758 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Roderick C. Mosely, Karl A. Littau +1 more | 2001-06-26 |