Issued Patents All Time
Showing 25 most recent of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12351914 | Deposition of films using molybdenum precursors | Joshua Collins, Griffin John Kennedy, Hanna Bamnolker, Seshasayee Varadarajan | 2025-07-08 |
| 12334351 | Molybdenum deposition | Jeong-Seok Na, Yao-Tsung HSIEH, Chiukin Steven Lai | 2025-06-17 |
| 12331396 | Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition | Ilanit Fisher, Raashina Humayun, Michal Danek, Shruti Vivek Thombare | 2025-06-17 |
| 12327762 | Molybdenum fill | Lawrence Schloss, Shruti Vivek Thombare, Zhongbo YAN, Joshua Collins | 2025-06-10 |
| 12274047 | Line bending control for memory applications | Gorun Butail, Shruti Vivek Thombare, Ishtak Karim | 2025-04-08 |
| 12203168 | Metal deposition | Ravi Vellanki, Eric H. Lenz, Vinayakaraddy Gulabal, Sanjay Gopinath, Michal Danek +5 more | 2025-01-21 |
| 12148623 | Deposition of tungsten on molybdenum templates | Shruti Vivek Thombare, Michal Danek | 2024-11-19 |
| 12112980 | Method to create air gaps | Seshasayee Varadarajan, Bart J. van Schravendijk | 2024-10-08 |
| 12074029 | Molybdenum deposition | Shruti Vivek Thombare, Michal Danek | 2024-08-27 |
| 12051589 | Tin oxide thin film spacers in semiconductor device manufacturing | David Charles Smith, Richard Wise, Arpan Mahorowala, Bart J. van Schravendijk | 2024-07-30 |
| 11970776 | Atomic layer deposition of metal films | Joshua Collins, Griffin John Kennedy, Hanna Bamnolker, Seshasayee Varadarajan | 2024-04-30 |
| 11887846 | Deposition tool and method for depositing metal oxide films on organic materials | Akhil Singhal | 2024-01-30 |
| 11864372 | Line bending control for memory applications | Gorun Butail, Shruti Vivek Thombare, Ishtak Karim | 2024-01-02 |
| 11827976 | Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition | Ilanit Fisher, Raashina Humayun, Michal Danek, Shruti Vivek Thombare | 2023-11-28 |
| 11784047 | Tin oxide thin film spacers in semiconductor device manufacturing | David Charles Smith, Richard Wise, Arpan Mahorowala, Bart J. van Schravendijk | 2023-10-10 |
| 11670516 | Metal-containing passivation for high aspect ratio etch | Karthik S. Colinjivadi, Samantha Tan, Shih-Ked Lee, George Matamis, Yongsik Yu +4 more | 2023-06-06 |
| 11637037 | Method to create air gaps | Seshasayee Varadarajan, Bart J. van Schravendijk | 2023-04-25 |
| 11270896 | Apparatus for UV flowable dielectric | Jonathan D. Mohn, Nicholas Muga Ndiege, David Fang Wei Chen, Wenbo Liang, Shawn M. Hamilton | 2022-03-08 |
| 11183383 | Tin oxide thin film spacers in semiconductor device manufacturing | David Charles Smith, Richard Wise, Arpan Mahorowala, Bart J. van Schravendijk | 2021-11-23 |
| 11088019 | Method to create air gaps | Seshasayee Varadarajan, Bart J. van Schravendijk | 2021-08-10 |
| 11031245 | Tin oxide thin film spacers in semiconductor device manufacturing | David Charles Smith, Richard Wise, Arpan Mahorowala, Bart J. van Schravendijk | 2021-06-08 |
| 10957514 | Apparatus and method for deposition and etch in gap fill | Akhil Singhal, Martin E. Freeborn, Bart J. van Schravendijk | 2021-03-23 |
| 10777453 | Low resistivity films containing molybdenum | Shruti Vivek Thombare, Raashina Humayun, Michal Danek, Chiukin Steven Lai, Joshua Collins +3 more | 2020-09-15 |
| 10777386 | Methods for controlling plasma glow discharge in a plasma chamber | Aaron Bingham | 2020-09-15 |
| 10615169 | Selective deposition of SiN on horizontal surfaces | Bart J. van Schravendijk, Awnish Gupta, Jason D. Park | 2020-04-07 |