Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12474640 | Integration of dry development and etch processes for EUV patterning in a single process chamber | Da Li, Hongtu Zhao, Ji-Yeong Kim, Samantha Tan, Daniel Peter +4 more | 2025-11-18 |