Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6225169 | High density plasma nitridation as diffusion barrier and interface defect densities reduction for gate dielectric | Kok Heng Chew | 2001-05-01 |
| 6149779 | Low-k BSG gap fill process using HDP | — | 2000-11-21 |
| 6030881 | High throughput chemical vapor deposition process capable of filling high aspect ratio structures | George D. Papasouliotis, Ashima B. Chakravarti, Richard A. Conti, Laertis Economikos | 2000-02-29 |
| 5872058 | High aspect ratio gapfill process by using HDP | Thomas W. Mountsier | 1999-02-16 |