Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957514 | Apparatus and method for deposition and etch in gap fill | Akhil Singhal, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2021-03-23 |
| 10373806 | Apparatus and method for deposition and etch in gap fill | Akhil Singhal, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2019-08-06 |
| 9773643 | Apparatus and method for deposition and etch in gap fill | Akhil Singhal, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2017-09-26 |
| 9111733 | Plasma ignition performance for low pressure physical vapor deposition (PVD) processes | Vince Burkhart | 2015-08-18 |