SL

Shih-Ked Lee

IT Integrated Device Technology: 32 patents #3 of 758Top 1%
Lam Research: 6 patents #476 of 2,128Top 25%
Overall (All Time): #84,413 of 4,157,543Top 3%
38
Patents All Time

Issued Patents All Time

Showing 25 most recent of 38 patents

Patent #TitleCo-InventorsDate
12266542 Atomic layer etching for subtractive metal etch Wenbing Yang, Mohand Brouri, Samantha Tan, Yiwen FAN, Wook Choi +3 more 2025-04-01
12249514 Carbon based depositions used for critical dimension control during high aspect ratio feature etches and for forming protective layers Jon Henri, Karthik S. Colinjivadi, Francis Sloan Roberts, Kapu Sirish Reddy, Samantha Tan +4 more 2025-03-11
12062537 High etch selectivity, low stress ashable carbon hard mask Jun Xue, Mary Anne Manumpil, Samantha Tan 2024-08-13
11935758 Atomic layer etching for subtractive metal etch Wenbing Yang, Mohand Brouri, Samantha Tan, Yiwen FAN, Wook Choi +3 more 2024-03-19
11670516 Metal-containing passivation for high aspect ratio etch Karthik S. Colinjivadi, Samantha Tan, George Matamis, Yongsik Yu, Yang Pan +4 more 2023-06-06
10340143 Anodic aluminum oxide as hard mask for plasma etching Chanyuan Liu 2019-07-02
7921400 Method for forming integrated circuit device using cell library with soft error resistant logic cells Chuen-Der Lien 2011-04-05
7582567 Method for forming CMOS device with self-aligned contacts and region formed using salicide process Tsengyou Syau, Chuen-Der Lien 2009-09-01
7560800 Die seal with reduced noise coupling Chuen-Der Lien 2009-07-14
7499303 Binary and ternary non-volatile CAM Chuen-Der Lien 2009-03-03
7408751 Self-biased electrostatic discharge protection method and circuit Chuen-Der Lien 2008-08-05
7400026 Thin film resistor structure Gaolong Jin, Wanqing Cao, Guo-Qiang Lo 2008-07-15
7375392 Gate structures having sidewall spacers formed using selective deposition Chih-Hsiang Chen, Guo-Qiang Lo 2008-05-20
7214990 Memory cell with reduced soft error rate Chuen-Der Lien, Louis Huang, Gaolong Jin, Wanqing Cao, Guo-Qiang Lo 2007-05-08
7125783 Dielectric anti-reflective coating surface treatment to prevent defect generation in associated wet clean Guo-Qiang Lo, Ohm-Guo Pan, Zhenjiang Yu, Yu Mao, Tsengyou Syau 2006-10-24
7098114 Method for forming cmos device with self-aligned contacts and region formed using salicide process Tsengyou Syau, Chuen-Der Lien 2006-08-29
7078306 Method for forming a thin film resistor structure Gaolong Jin, Wanqing Cao, Guo-Qiang Lo 2006-07-18
7067364 Gate structures having sidewall spacers using selective deposition and method of forming the same 2006-06-27
7042792 Multi-port memory cells for use in FIFO applications that support data transfers between cache and supplemental memory arrays Mario Au 2006-05-09
7015116 Stress-relieved shallow trench isolation (STI) structure and method for forming the same Guo-Qiang Lo, Brian Schorr, Gary Foley 2006-03-21
6872668 Multi-step tungsten etchback process to preserve barrier integrity in an integrated circuit structure Wanqing Cao, Guo-Qiang Lo, Hongyong Xue 2005-03-29
6791155 Stress-relieved shallow trench isolation (STI) structure and method for forming the same Guo-Qiang Lo, Brian Schorr, Gary Foley 2004-09-14
6627543 Low-temperature sputtering system and method for salicide process Wanqing Cao, Guo-Qiang Lo, Robert B. Hixson, Eric Lee 2003-09-30
6566236 Gate structures with increased etch margin for self-aligned contact and the method of forming the same Tsengyou Syau, Guo-Qiang Lo, Chuen-Der Lien, Sang-Yun Lee, Ching-Kai Lin 2003-05-20
6534414 Dual-mask etch of dual-poly gate in CMOS processing Kuilong Wang, Tsengyou Syau, Chuen-Der Lien 2003-03-18