| 12417902 |
Method for cleaning a chamber |
Ran Lin, Tamal Mukherjee, Jengyi Yu, Samantha Tan, Yang Pan +1 more |
2025-09-16 |
|
| 12400842 |
Method of cleaning chamber components with metal etch residues |
Samantha Tan, Ran Lin, Tamal Mukherjee, Chunhong Zhou, Xiaoyu Kang +2 more |
2025-08-26 |
|
| 12266542 |
Atomic layer etching for subtractive metal etch |
Mohand Brouri, Samantha Tan, Shih-Ked Lee, Yiwen FAN, Wook Choi +3 more |
2025-04-01 |
|
| 12256645 |
Chemical etch nonvolatile materials for MRAM patterning |
Tamal Mukherjee, Zhongwei Zhu, Samantha Tan, Ran Lin, Yang Pan +2 more |
2025-03-18 |
|
| 12105422 |
Photoresist development with halide chemistries |
Samantha Tan, Jengyi Yu, Da Li, Yiwen FAN, Yang Pan +5 more |
2024-10-01 |
$207,578,000 |
| 12080562 |
Atomic layer etch and ion beam etch patterning |
Samantha Tan, Tamal Mukherjee, Girish Dixit, Yang Pan |
2024-09-03 |
$105,811,000 |
| 11935758 |
Atomic layer etching for subtractive metal etch |
Mohand Brouri, Samantha Tan, Shih-Ked Lee, Yiwen FAN, Wook Choi +3 more |
2024-03-19 |
$316,293,000 |
| 11450513 |
Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials |
Tamal Mukherjee, Mohand Brouri, Samantha Tan, Yang Pan, Keren Jacobs Kanarik |
2022-09-20 |
$144,829,000 |
| 11069535 |
Atomic layer etch of tungsten for enhanced tungsten deposition fill |
Chiukin Steven Lai, Keren Jacobs Kanarik, Samantha Tan, Anand Chandrashekar, Teh-Tien Su +2 more |
2021-07-20 |
$260,622,000 |
| 10763083 |
High energy atomic layer etching |
Samantha Tan, Tamal Mukherjee, Keren Jacobs Kanarik, Yang Pan |
2020-09-01 |
$45,225,000 |
| 10749103 |
Dry plasma etch method to pattern MRAM stack |
Samantha Tan, Taeseung Kim, Jeffrey Marks, Thorsten Lill |
2020-08-18 |
$99,334,000 |
| 10727073 |
Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces |
Samantha Tan, Keren Jacobs Kanarik, Thorsten Lill, Yang Pan |
2020-07-28 |
$107,178,000 |
| 10515816 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) |
Keren Jacobs Kanarik, Jeffrey Marks, Harmeet Singh, Samantha Tan, Alexander Kabansky +3 more |
2019-12-24 |
$46,593,000 |
| 10374144 |
Dry plasma etch method to pattern MRAM stack |
Samantha Tan, Taeseung Kim, Jeffrey Marks, Thorsten Lill |
2019-08-06 |
$34,626,000 |
| 10186426 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ale (atomic layer etch) |
Keren Jacobs Kanarik, Jeffrey Marks, Harmeet Singh, Samantha Tan, Alexander Kabansky +3 more |
2019-01-22 |
$50,002,000 |
| 10096487 |
Atomic layer etching of tungsten and other metals |
Samantha Tan, Keren Jacobs Kanarik, Jeffrey Marks, Taeseung Kim, Meihua Shen +1 more |
2018-10-09 |
$18,504,000 |
| 10056264 |
Atomic layer etching of GaN and other III-V materials |
Tomihito Ohba, Samantha Tan, Keren Jacobs Kanarik, Jeffrey Marks, Kazuo Nojiri |
2018-08-21 |
$41,269,000 |
| 9972504 |
Atomic layer etching of tungsten for enhanced tungsten deposition fill |
Chiukin Steven Lai, Keren Jacobs Kanarik, Samantha Tan, Anand Chandrashekar, Teh-Tien Su +2 more |
2018-05-15 |
$34,519,000 |
| 9805941 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) |
Keren Jacobs Kanarik, Jeffrey Marks, Harmeet Singh, Samantha Tan, Alexander Kabansky +3 more |
2017-10-31 |
$46,599,000 |
| 9806252 |
Dry plasma etch method to pattern MRAM stack |
Samantha Tan, Taeseung Kim, Jeffrey Marks, Thorsten Lill |
2017-10-31 |
$46,599,000 |
| 9576811 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) |
Keren Jacobs Kanarik, Jeffrey Marks, Harmeet Singh, Samantha Tan, Alexander Kabansky +3 more |
2017-02-21 |
$45,528,000 |
| 9502600 |
Inorganic solution and solution process for electronic and electro-optic devices |
Yang Yang, Shenghan Li, Wan-Ching Hsu |
2016-11-22 |
|
| 9391267 |
Method to etch non-volatile metal materials |
Meihua Shen, Harmeet Singh, Samantha Tan, Jeffrey Marks, Thorsten Lill +2 more |
2016-07-12 |
$14,257,000 |
| 9257638 |
Method to etch non-volatile metal materials |
Samantha Tan, Meihua Shen, Richard Janek, Jeffrey Marks, Harmeet Singh +1 more |
2016-02-09 |
$11,583,000 |
| 9130158 |
Method to etch non-volatile metal materials |
Meihua Shen, Harmeet Singh, Samantha Tan, Jeffrey Marks, Thorsten Lill +2 more |
2015-09-08 |
$7,662,000 |
