Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784118 | Atomic layer etching using a combination of plasma and vapor treatments | Andreas Fischer, Thorsten Lill, John D. Boniface | 2020-09-22 |
| 10559475 | Control of directionality in atomic layer etching | Andreas Fischer, Thorsten Lill | 2020-02-11 |
| 10256108 | Atomic layer etching of AL2O3 using a combination of plasma and vapor treatments | Andreas Fischer, Thorsten Lill, John D. Boniface | 2019-04-09 |
| 10229837 | Control of directionality in atomic layer etching | Andreas Fischer, Thorsten Lill | 2019-03-12 |
| 9391267 | Method to etch non-volatile metal materials | Meihua Shen, Harmeet Singh, Samantha Tan, Jeffrey Marks, Thorsten Lill +2 more | 2016-07-12 |
| 9257638 | Method to etch non-volatile metal materials | Samantha Tan, Wenbing Yang, Meihua Shen, Jeffrey Marks, Harmeet Singh +1 more | 2016-02-09 |
| 9130158 | Method to etch non-volatile metal materials | Meihua Shen, Harmeet Singh, Samantha Tan, Jeffrey Marks, Thorsten Lill +2 more | 2015-09-08 |
| 8524329 | Electroless copper deposition | Yezdi Dordi, Dries Dictus | 2013-09-03 |
| 7022287 | Single particle electrochemical sensors and methods of utilization | Joseph S. Schoeniger, Albert W. Flounders, Robert C. Hughes, Antonio J. Ricco, Karl Wally +1 more | 2006-04-04 |