Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315727 | Eliminating yield impact of stochastics in lithography | Nader Shamma, Richard Wise, Jengyi Yu | 2025-05-27 |
| 12293919 | Alternating etch and passivation process | Seongjun Heo, Jengyi Yu, Chen-Wei Liang, Alan J. Jensen | 2025-05-06 |
| 12131909 | Selective processing with etch residue-based inhibitors | Kashish Sharma, Taeseung Kim, Dennis M. Hausmann | 2024-10-29 |
| 12062538 | Atomic layer etch and selective deposition process for extreme ultraviolet lithography resist improvement | Jengyi Yu, Liu-Yang Yang, Chen-Wei Liang, Boris Volosskiy, Richard Wise +4 more | 2024-08-13 |
| 11988965 | Underlayer for photoresist adhesion and dose reduction | Jun Xue, Mary Anne Manumpil, Jengyi Yu, Da Li | 2024-05-21 |
| 11848212 | Alternating etch and passivation process | Seongjun Heo, Jengyi Yu, Chen-Wei Liang, Alan J. Jensen | 2023-12-19 |
| 11823909 | Selective processing with etch residue-based inhibitors | Kashish Sharma, Taeseung Kim, Dennis M. Hausmann | 2023-11-21 |
| 11551938 | Alternating etch and passivation process | Seongjun Heo, Jengyi Yu, Chen-Wei Liang, Alan J. Jensen | 2023-01-10 |
| 11314168 | Underlayer for photoresist adhesion and dose reduction | Jun Xue, Mary Anne Manumpil, Jengyi Yu, Da Li | 2022-04-26 |
| 11257674 | Eliminating yield impact of stochastics in lithography | Nader Shamma, Richard Wise, Jengyi Yu | 2022-02-22 |
| 11062897 | Metal doped carbon based hard mask removal in semiconductor fabrication | Yongsik Yu, David Cheung, Kirk Ostrowski, Nikkon Ghosh, Karthik S. Colinjivadi +2 more | 2021-07-13 |
| 10796912 | Eliminating yield impact of stochastics in lithography | Nader Shamma, Richard Wise, Jengyi Yu | 2020-10-06 |
| 9391267 | Method to etch non-volatile metal materials | Meihua Shen, Harmeet Singh, Jeffrey Marks, Thorsten Lill, Richard Janek +2 more | 2016-07-12 |
| 9257638 | Method to etch non-volatile metal materials | Wenbing Yang, Meihua Shen, Richard Janek, Jeffrey Marks, Harmeet Singh +1 more | 2016-02-09 |
| 9130158 | Method to etch non-volatile metal materials | Meihua Shen, Harmeet Singh, Jeffrey Marks, Thorsten Lill, Richard Janek +2 more | 2015-09-08 |
| 8691023 | Methods and apparatus for cleaning deposition chamber parts using selective spray etch | Liyuan Bao, Anbei Jiang | 2014-04-08 |
| 8492674 | Methods and apparatus for ex situ seasoning of electronic device manufacturing process components | Jiansheng Wang | 2013-07-23 |
| 8398779 | Non destructive selective deposition removal of non-metallic deposits from aluminum containing substrates | Liyuan Bao, Anbei Jiang, Sio On Lo, Yukari Nishimura, Joseph F. Sommers | 2013-03-19 |
| 8097089 | Methods for cleaning process kits and chambers, and for ruthenium recovery | Jianqi Wang | 2012-01-17 |
| 7789969 | Methods and apparatus for cleaning chamber components | Felix Rabinovich, Thomas Echols, Janet Maleski, Ning Chen | 2010-09-07 |
| 7754609 | Cleaning processes for silicon carbide materials | — | 2010-07-13 |
| 7452475 | Cleaning process and apparatus for silicate materials | Ning Chen | 2008-11-18 |
| 7377991 | Ultrasonic assisted etch using corrosive liquids | Ning Chen | 2008-05-27 |
| 7091132 | Ultrasonic assisted etch using corrosive liquids | Ning Chen | 2006-08-15 |
| 7045072 | Cleaning process and apparatus for silicate materials | Ning Chen | 2006-05-16 |