Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062897 | Metal doped carbon based hard mask removal in semiconductor fabrication | Yongsik Yu, David Cheung, Nikkon Ghosh, Karthik S. Colinjivadi, Samantha Tan +2 more | 2021-07-13 |
| 9613825 | Photoresist strip processes for improved device integrity | Roey Shaviv, David Cheung, Joon Park, Bayu Thedjoisworo, Patrick J. Lord | 2017-04-04 |
| 9564344 | Ultra low silicon loss high dose implant strip | David Cheung, Haoquan Fang, Jack Kuo, Ilia Kalinovski, Zhao Li +2 more | 2017-02-07 |
| 8716143 | Plasma based photoresist removal system for cleaning post ash residue | David Cheung | 2014-05-06 |
| 8591661 | Low damage photoresist strip method for low-K dielectrics | David Cheung, Ted Li, Anirban Guha | 2013-11-26 |
| 8129281 | Plasma based photoresist removal system for cleaning post ash residue | David Cheung | 2012-03-06 |
| 6693043 | Method for removing photoresist from low-k films in a downstream plasma system | Senzi Li, Helmuth Treichel, Chevan Goonetilleke, Jim Su, David Chen | 2004-02-17 |